Infrared window anti-reflection protective film

Abstract

The invention discloses an infrared window anti-reflection protective film, and belongs to the technical field of infrared photoelectricity. The film comprises a substrate layer, a transition layer and a diamond-like layer; the substrate layer is deposited by a chalcogenide material, germanium or silicon material in a physical vapor deposition mode, and argon is used for ion assistance in the deposition process, so that the compactness of the film layer is increased, and meanwhile, the stress of the film layer is reduced; the transition layer is made of germanium, silicon, zinc selenide and ytterbium fluoride, has good adhesive force and is beneficial to deposition of the diamond-like carbon layer on the chalcogenide material; the structure is divided into a four-layer structure, a six-layer structure and an eight-layer structure; the diamond-like carbon layer is prepared through a chemical vapor deposition method, butane is adopted as a gas source, argon is adopted as carrier gas for deposition, and the proportion of butane and argon and the size of radio frequency power are controlled in the deposition process. The transition layer serves as a middle layer between the diamond-like carbon layer and the substrate layer, on one hand, the optical permeability of the window is improved, and on the other hand, stress between film layers is reduced.

Description

technical field [0001] The invention relates to the field of infrared photoelectric technology, in particular to an anti-reflection protective film for an infrared window. Background technique [0002] In practical optical systems, especially infrared optoelectronic systems, they often consist of multiple optical elements. Therefore, it is extremely important to reduce the loss on the surface of the optical element and increase the transmittance of the optical element. At the same time, windows used in photoelectric systems, such as civilian security vehicles and military weapons and equipment, are often in direct contact with the atmosphere. Infrared windows such as germanium, silicon, and chalcogenide glass have poor weather resistance. The harsh atmospheric environment will damage the surface of these windows, resulting in the failure of the optical system. Such windows must be protected. Contents of the invention [0003] The purpose of the present invention is to pr...

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Problems solved by technology

[0003] The purpose of the present invention is to provide an infrared window anti-reflection protective film to solve the problem that the existing infrared window itself has poor weather resistance, and the harsh atmospheric environment will cause damage to the surface of these windows, causing the failure of the optical system.

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