Display substrate, manufacturing method thereof and display device

A technology for a display substrate and a manufacturing method, which is used in the manufacture of semiconductor/solid-state devices, electrical components, and electrical solid-state devices, etc., can solve problems such as long alignment time, inability to guarantee the position and size accuracy of functional graphics, and achieve guaranteed accuracy. , the overall time shortening, the effect of shortening the exposure time

Pending Publication Date: 2021-06-18
WUHAN BOE OPTOELECTRONICS TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The more accurate the alignment, the longer the alignment time will be, and even if the alignment is ac

Method used

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  • Display substrate, manufacturing method thereof and display device
  • Display substrate, manufacturing method thereof and display device
  • Display substrate, manufacturing method thereof and display device

Examples

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[0047] In order to further illustrate the display substrate and the production method thereof, the display device thereof, and the following description will be described in detail below.

[0048] Such as figure 1 As shown, when the functional pattern 80 is produced in the related art, it can be formed by a composition process, and specifically comprises: deposition of a functional layer on the substrate; a photoresist layer is formed on one side of the substrate to the substrate. The photoresist layer performs a primary exposure process and a developing process to form a photoresist pattern, and then the functional layer is etched to form a functional pattern with the photoresist pattern as a mask.

[0049] When the photoresist layer is exposed, the photoresist layer needs to be accurately paired with the mask plate, thereby ensuring the accuracy of the formed photoresist pattern and functional graphics.

[0050] The longer the session time required for the bit, and even if the o...

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Abstract

The invention provides a display substrate, a manufacturing method thereof and a display device, relates to the technical field of display, and aims to shorten the manufacturing time of a functional graph while ensuring the manufacturing precision of the functional graph in a display device. The manufacturing method of the display substrate comprises the following steps: manufacturing a shading pattern on a light-transmitting substrate; manufacturing a functional layer at the side, back on to the light-transmitting substrate, of the shading pattern; manufacturing a photoresist transition pattern on one side, opposite to the light-transmitting substrate, of the functional layer; taking the shading pattern as a mask, and performing a back exposure process on the photoresist transition pattern at the side, back to the photoresist transition pattern, of the light-transmitting substrate; performing a developing process on the photoresist transition pattern subjected to the back exposure process to form a photoresist target pattern; and patterning the functional layer by taking the photoresist target pattern as a mask to form a functional pattern. The manufacturing method provided by the invention is used for manufacturing the display substrate.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a display substrate, a manufacturing method thereof, and a display device. Background technique [0002] With the continuous development of display technology, the application fields of display devices are becoming more and more extensive. The display device includes a variety of functional graphics, and the functional graphics are generally formed through a patterning process. The patterning process includes forming a photoresist on the functional graphics to be formed, and performing an exposure process on the photoresist. When performing the exposure process , accurate alignment is required to ensure the precise size and position of the subsequently formed functional graphics and ensure the display performance of the display device. [0003] The more accurate the alignment, the longer the alignment time is required, and even if the alignment is accurate, sometimes the accura...

Claims

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Application Information

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IPC IPC(8): H01L21/027H01L21/84H01L23/544H01L27/12
CPCH01L27/1288H01L27/1218H01L27/1262H01L23/544H01L21/0274
Inventor 尹雄宣
Owner WUHAN BOE OPTOELECTRONICS TECH CO LTD
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