A kind of plasma current calculation method and device
A plasma and current calculation technology, applied in the field of data processing, can solve the problem of low accuracy of plasma current calculation, and achieve the effects of improving inversion accuracy, optimizing model structure, and improving calculation accuracy
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[0056] Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present invention will be more thoroughly understood, and will fully convey the scope of the present invention to those skilled in the art.
[0057] like figure 1 As shown, this embodiment proposes a plasma current calculation method, which may include the following steps:
[0058] S101, obtaining external diagnostic data of the plasma current, and the plasma current exists in the current plasma current region in the inner vacuum chamber;
[0059] The plasma current region may be a region containing plasma current in the inner vacuum. It should be noted that, no pla...
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