Multilayer body and crystalline body
A technology of laminates and phononic crystals, applied in the direction of layered products, semiconductor devices, microstructure technology, etc., can solve the problems of reducing thermal conductivity and reducing thermal conductivity.
Pending Publication Date: 2021-06-22
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
However, the thermal conductivity of the base material constituting the thin film itself can be lowered due to the phononic crystal structure
Therefore, it can be expected that the thermal conductivity will be further reduced compared to simple porosity.
Method used
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[0055] (embodiment of the present disclosure)
[0056] Embodiments of the present disclosure will be described below with reference to the drawings. In addition, embodiment described below shows a general example or a specific example. Numerical values, shapes, materials, constituent elements, arrangement positions of constituent elements, connection methods, process conditions, steps, order of steps, etc. shown in the following embodiments are examples and do not limit the present disclosure. In addition, among the constituent elements in the following embodiments, the constituent elements not described in the independent claims representing the highest concept will be described as optional constituent elements. In addition, each drawing is a schematic diagram, and it does not necessarily illustrate strictly.
[0057] An example of the laminated body of the present disclosure is shown in figure 1 , Figure 2A and Figure 2B . Figure 2A It is viewed from the side of the...
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Abstract
The present disclosure provides an unprecedented multilayer body. The multilayer body according to the present disclosure is provided with: a first phononic crystal layer; and a second phononic crystal layer which is arranged on top of or above the first phononic crystal layer. The first phononic crystal layer has a first phononic crystal structure which comprises a plurality of first through holes that are regularly arranged. The second phononic crystal layer has a second phononic crystal structure which comprises a plurality of second through holes that are regularly arranged. The penetration direction of the plurality of first through holes in the first phononic crystal layer and the penetration direction of the plurality of second through holes in the second phononic crystal layer are generally parallel to each other.
Description
technical field [0001] The present disclosure relates to a laminate having a plurality of layers having a phononic crystal structure. Additionally, the present disclosure relates to crystals having a phononic crystal structure. Background technique [0002] Patent Document 1, Patent Document 2, and Non-Patent Document 1 disclose a periodic structure composed of a plurality of through holes. In this periodic structure, through-holes are regularly arranged at a nanoscale (1 nm to 1000 nm region) period when the thin film is viewed from above. This periodic structure is a type of phonon crystal structure. This type of phononic crystal structure is a periodic structure in which the smallest unit constituting the arrangement of through holes is the unit cell. According to this phononic crystal structure, for example, the thermal conductivity of a thin film can be reduced. The thermal conductivity of the thin film can be lowered, for example, by making it porous. The thermal ...
Claims
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IPC IPC(8): B32B7/027C01B33/02H01L29/32H01L35/32
CPCB32B7/027H01L29/32C01B33/02B81B3/0081H10N10/857H10N10/17B82Y20/00
Inventor 藤金正树反保尚基中村邦彦高桥宏平内藤康幸
Owner PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD