Loading and unloading robot with visual detection and square cutting machine using the robot

Abstract

The present invention discloses a loading and unloading robot with visual inspection and a square cutting machine using the robot, including a loading and unloading robot 1 and a visual detection component 2. The loading and unloading robot 1 is used for loading and unloading of the cutting machine, and is used for the The visual inspection component 2, which is checked before the loading and unloading robot 1 clamps the silicon rod, is installed on the outside of the loading and unloading robot 1. In the present invention, a visual inspection component is added near the loading and unloading robot, so that the loading and unloading robot can clamp the silicon rod. When feeding, each silicon rod can be checked for accuracy once, which is more accurate than the existing method in which the accuracy of the clamping jaws is found to be deviated when the square rod is unqualified, and the feeding accuracy can be stably guaranteed for a long time. unchanged and largely unaffected by clamp wear.

Description

technical field [0001] The invention relates to the technical field of silicon rod processing equipment, in particular to a loading and unloading robot with visual detection and a square cutting machine using the robot. Background technique [0002] The production process of the existing silicon wafer is generally to square the silicon rods (such as silicon rods or polycrystalline silicon rods) through a square cutting machine, so that the silicon rods are generally rectangular; Rounding and polishing; finally, use a multi-wire slicer to slice the squared silicon rods. [0003] The traditional manipulator is adjusted by mechanical precision, which can ensure the center position accuracy of the silicon rod and the perpendicularity to the horizontal plane of the machine tool after clamping the silicon rod each time. Replacing the clamping parts and readjusting the accuracy of the jaws will inevitably waste labor and reduce production capacity; and before each adjustment, the ...

AI Technical Summary

Problems solved by technology

[0003] The traditional manipulator is adjusted by mechanical precision, which can ensure the center position accuracy of the silicon rod and the perpendicularity to the horizontal plane of the machine tool after clamping the silicon rod each time. Replacing the clamping parts and readjusting the accuracy of the jaws will inevitably waste labor and reduce production capacity; and before each adjustment, the clamping accuracy will continue to decrease. Only when the square bar fails to pass the inspection will the deviation of the jaw accuracy be found. Silicon material is wasted and the performance is unstable. Therefore, we propose a loading and unloading robot with visual inspection and a square cutting machine using this robot.

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