Torque detection device and method, robot, article manufacturing method, and control apparatus
A technology of torque detection and manufacturing methods, which is applied in the direction of manufacturing tools, metal processing equipment, instruments, etc., and can solve the problems of effective torque detection accuracy degradation
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no. 1 example
[0031] Structure of Torque Sensor Unit
[0032] A torque sensor unit of a first embodiment will be described with reference to some drawings.
[0033] Figure 1A is a bottom view of the torque sensor unit 20, Figure 1B is a side view of the torque sensor unit 20, figure 2 is a plan view of the torque sensor unit 20 . The torque sensor unit 20 includes a structure 1 and an optical encoder 10 that detects deformation of the structure 1 .
[0034] image 3 is a perspective view illustrating the appearance of Structure 1.
[0035] The structure 1 includes an outer ring portion 2 serving as a first portion, an inner ring portion 3 serving as a second portion, and a connecting portion 4 connecting the outer ring portion 2 and the inner ring portion 3 . The outer ring portion 2 and the inner ring portion 3 have a donut-shaped (ring-shaped) basic shape with different diameters, and are coaxially formed around the rotation shaft 14 .
[0036] The outer ring portion 2 and the in...
no. 2 example
[0087] Next, we will refer to Figure 8A and Figure 8B A torque sensor unit of a second embodiment is described. In the first embodiment, the outer ring portion 2 and the inner ring portion 3 are not formed in a cylindrical shape with a constant thickness. Alternatively, each of the outer ring portion 2 and the inner ring portion 3 has a flange portion projecting in a direction orthogonal to the rotation shaft 14 and is substantially L-shaped in cross section.
[0088] The second embodiment is the same as the first embodiment in that the outer ring portion 2 and the inner ring portion 3 each have a flange portion projecting in a direction orthogonal to the rotation shaft 14 . However, the second embodiment differs from the first embodiment in the shape of the flange portion. In the following description of the second embodiment, descriptions of the same features as those of the first embodiment will be simplified or omitted.
[0089] of the second embodiment Figure 8A a...
no. 3 example
[0097] Next, we will refer to Figure 9A and Figure 9B A torque sensor unit of a third embodiment is described. In the first embodiment, the outer ring portion 2 and the inner ring portion 3 are not formed in a cylindrical shape with a constant thickness. Alternatively, each of the outer ring portion 2 and the inner ring portion 3 has a flange portion projecting in a direction orthogonal to the rotation shaft 14, and the cross section of each of the outer ring portion 2 and the inner ring portion 3 is substantially It is L-shaped.
[0098] The third embodiment is the same as the first embodiment in that each of the outer ring portion 2 and the inner ring portion 3 has a flange portion that protrudes in a direction orthogonal to the rotation shaft 14 . However, the third embodiment differs from the first embodiment in the shape of the cylindrical portion. In the following description of the third embodiment, descriptions of the same features as those of the first embodimen...
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