Micro-nano fiber-waveguide-superconducting nanowire single photon detector and its preparation method

Abstract

The invention provides a micro-nano fiber-waveguide-superconducting nanowire single-photon detector and a preparation method; the micro-nano fiber fixed in the V-shaped groove can achieve high-precision optical coupling alignment with the waveguide, and the micro-nano fiber can be aligned by The thick and thin transition section is suspended to prevent light from leaking to the substrate, thereby reducing the loss in the light transmission process; the waveguide superconducting nanowire structure can realize complete absorption of light on the chip; the curved waveguide design can make the micro-nano fiber ‑The optical coupling area of ​​the waveguide is completely separated from the optical detection area of ​​the waveguide superconducting nanowire structure, which can effectively reduce the dark count caused by the background radiation propagating along the optical fiber, and reduce the influence of the background dark count on the light detection; the present invention can realize A single-photon detector integrating high detection efficiency, high count rate, low time jitter and low dark count is expected to play a role in the fields of optical quantum information processing and quantum optics.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection, and relates to a micro-nano fiber-waveguide-superconducting nanowire single-photon detector and a preparation method. Background technique [0002] Superconducting Single Photon Detector (SSPD) is a single-photon detection technology that has attracted much attention in recent years. The system efficiency can reach more than 90%. Compared with conventional semiconductor detectors, it has extremely low dark count, low It has the advantages of time jitter and high count rate, and its spectral response is wide, covering the visible light band to the infrared band. High-performance SSPD devices have been widely used in many fields such as quantum key distribution, optical quantum computing, and deep space exploration. However, various performance indicators of SSPD are mutually restricted, such as dark count, detection speed, detection efficiency, time jitter, etc. The current techno...

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Problems solved by technology

[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a micro-nano fiber-waveguide-superconducting nanowire single-photon detector and its preparation method, which are used to solve the problem of difficult integration of single-photon detectors in the prior art. Simultaneous optimization of various high-performance indicators

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