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Mass flow controller and controller algorithm

A mass flow, controller technology, applied in the direction of flow control, flow control using electrical devices, non-electric variable control, etc., can solve the problems of maintaining flow, lack of complexity, etc.

Pending Publication Date: 2021-08-17
ILLINOIS TOOL WORKS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Currently available MFCs lack the complexity required to maintain a limited level of control to consistently maintain the desired flow rate without introducing noise into the system due to various non-linear artifacts

Method used

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  • Mass flow controller and controller algorithm
  • Mass flow controller and controller algorithm
  • Mass flow controller and controller algorithm

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Embodiment Construction

[0019] While the making and using of various embodiments of the disclosure are discussed in detail below, it should be appreciated that the disclosure provides many applicable inventive concepts that can be embodied in many specific contexts. The specific embodiments discussed herein are illustrative only and do not limit the scope of the disclosure. In the interest of clarity, not all features of an actual implementation may be described in this disclosure. It should be appreciated, of course, that in the development of any such practical embodiment, many implementation-specific decisions must be made to achieve the developer's specific goals, such as compliance with system-related constraints and business-related constraints, This will vary by implementation. In addition, it should be appreciated that such a development effort might be complex and time consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of thi...

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Abstract

A mass flow controller that includes a linearization system to control the linear response of a valve in order to control the gain of the mass flow controller. The linearization system includes a flow modeling system for processing at least one of a fluid type, a flow rate, a pressure, and a temperature value signal relating to flow of the fluid through a flow path and determining fluid properties. The linearization system also includes a valve modeling system to determine the required operational characteristics of the valve according to valve specifications, a desired flow rate, and the determined fluid properties. The linearization system determines a gain to control the lift of the valve in order to acquire a desired fluid flow rate. The gain is determined by calculating the derivative of predicted lift with respect to fluid flow and the derivative of drive with respect to predicted lift.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Patent Application No. 16 / 116,780, filed August 29, 2018, entitled "Mass Flow Controller and controller algorithm," which is The entire contents are hereby incorporated by reference for all purposes. technical field [0003] The present disclosure relates generally to mass flow controllers (MFCs) for controlling the flow of fluid through a flow path, and more particularly to a method for controlling the gain of a mass flow controller by controlling the linear response of a mass flow controller valve. MFC and controller algorithms. Background technique [0004] An MFC is a device for controlling fluid flow through a flow path based on desired flow and real-time feedback measurements of measured temperature, pressure, and fluid flow. To control this process and maintain the desired flow, a mass flow controller electromechanically controls the opening and closing of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D7/06
CPCG05D7/0635G05D7/0623G05B17/02
Inventor 约翰·勒尔伯温·班纳斯杰弗里·怀特利
Owner ILLINOIS TOOL WORKS INC