A Digital Constant Power High Voltage Plasma Power Supply

Abstract

The invention relates to a digital constant power high-voltage plasma power supply, comprising an electromagnetic interference filter circuit, a soft start circuit, a single-phase rectifier circuit, a filter energy storage circuit, a full bridge circuit, an LLCC resonance circuit, a power voltage sampling circuit, and a power current sampling circuit. circuit, digital control circuit, MOSFET drive circuit, RS485 communication circuit. The input voltage is connected to the single-phase rectifier circuit through an electromagnetic interference filter circuit, and a DC voltage is formed through a filter energy storage circuit, which is connected to a full-bridge circuit for chopping, and then connected to an LLCC resonant circuit for oscillation filtering, and subsequently connected to a high-voltage transformer for output; The soft-start circuit is connected to the single-phase rectifier circuit, the power voltage sampling circuit and the power current sampling circuit are connected to the digital control circuit to provide closed-loop sampling calculation parameters, the digital control circuit is connected to the full-bridge circuit through the MOSFET drive circuit, and the digital control circuit is connected to all Describe the RS485 communication circuit.

Description

technical field [0001] The invention relates to a plasma power supply, in particular to a digital constant power high-voltage plasma power supply, which belongs to the field of plasma technology application. Background technique [0002] The digital constant-power high-voltage plasma power supply involved in the invention is suitable for polymerization jet plasma loads. Polymerization jet plasma loading forms include round mouth direct injection type, honeycomb mouth direct injection type, oval mouth direct injection type, round mouth rotary type, flat mouth rotary type and other forms. The polymer jet plasma load has a built-in high-voltage discharge electrode. The high-voltage electrode and the grounding shell are insulated by a ceramic sheath, and the plasma is formed by discharging between the high-voltage electrode tip and the grounding shell. The high-voltage discharge is formed by dry compressed air. The plasma is blown out to form a stable plasma flame. The plasma ...

AI Technical Summary

Problems solved by technology

The plasma power supply that has been commercialized in China uses an open-loop half-bridge hard switch structure. The power efficiency of the power supply is low, the output power is uncontrollable, the stability is poor, the failure rate is high, and the anti-interference ability is weak. It is not suitable for mass use and it is difficult to meet the stability requirements. Controllable material surface treatment requirements; therefore, there is an urgent need for a new solution to solve the above technical problems

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