Backside illuminated TDI image sensor

An image sensor, back-illuminated technology, used in image communication, TV, color TV components, etc., can solve the problems of MTF decline, inconsistent charge distribution, affecting imaging quality, etc., to improve MTF, improve continuity, ensure The effect of image quality

Pending Publication Date: 2021-11-02
GPIXEL +1
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AI Technical Summary

Problems solved by technology

However, since the microlens 2' only covers one pixel unit, the adjacent control gates between two pixel units 2' will have inconsistent charge distribution, such as figure 2 As shown, when TDI push-broom is performed, the charge 3` transferred under each control gate will have a difference, causing discontinuity of charge transfer, resulting in a decrease in MTF and affecting the imaging quality

Method used

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  • Backside illuminated TDI image sensor
  • Backside illuminated TDI image sensor
  • Backside illuminated TDI image sensor

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Embodiment Construction

[0016] To make the objectives, technical solutions and advantages of the present invention will become more apparent hereinafter in conjunction with the accompanying drawings and specific embodiments of the present invention will be further described in detail. It should be understood that the specific embodiments described herein are merely used to explain the present invention and are not intended to limit the present invention.

[0017] image 3 Shows the structure of a backside illuminated image sensor, a TDI embodiment of the present invention.

[0018] like image 3 Shown, back-illuminated TDI image sensor according to an embodiment of the present invention includes a pixel cell array, pixel unit array comprising at least one pixel unit, the structure of each pixel unit are the same.

[0019] Pixel unit includes a set of control gate, the control gate comprises at least three control gate, a plurality of control gates are arranged in columns, to achieve transfer of charge int...

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Abstract

The invention provides a backside illuminated TDI image sensor which comprises a pixel unit array, and each column of pixel units of the pixel unit array are respectively covered with a micro lens. Each pixel unit in the pixel unit array comprises a control grid group, each control grid group comprises at least three control grids which are arranged in a row, two sides of each control grid group are respectively provided with an anti-halo grid which is arranged along the longitudinal direction, one side of each anti-halo grid, which is far away from the control grid group, is respectively provided with an anti-halo grid which is arranged along the longitudinal direction. The two anti-halo grids are connected through transverse metal. According to the invention, the MTF can be improved while the QE is improved.

Description

Technical field [0001] The present invention relates to a back illuminated image BACKGROUND TDI sensor, and more particularly to a backside illuminated image sensor with TDI can enhance the MTF. Background technique [0002] Time delay integration (Time Delay Integration, TDI) image sensors have been space exploration, detection and medical imaging industry has a wide application field. Quantum efficiency (Quantum Efficiency, QE) and modulation transfer function (Modulation Transfer Function, MTF) is a factor directly affect the optical properties of the image sensor, QE lifting means lift the image SNR, MTF improvement of resolving power of the sensor means upgrade, which means to enhance the image quality. [0003] For the back-illuminated image sensor, in order to enhance the QE, an overlay microlens design is applied on the pixel unit. Specific practices such as figure 1 Shown, a separate microlens on each pixel cell 2 '1', 1 'surrounding the pixel units light converging in t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04N5/355
CPCH04N25/59
Inventor 王欣洋周泉马成刘芳园
Owner GPIXEL
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