Automatic two-dimensional material transfer device

Abstract

The invention is suitable for the field of automation, and provides an automatic two-dimensional material transfer device. The automatic two-dimensional material transfer device comprises a transfer table and a sample table. The sample table comprises a sample seat, a heat insulation table, a vacuum part, a rotary displacement table, a first XY-axis displacement table and a sample table base; and the transfer table comprises a transfer arm, a coarse adjustment Z-axis displacement table, a fine adjustment Z-axis displacement table, a pitching deflection displacement table, a second XY-axis displacement table and a transfer table base. According to the automatic two-dimensional material transfer device, by automatically operating a sample fixing and transferring glass slide and freely controlling the position of the glass slide,the transfer in a vacuum ultra-clean glove box is realized, namely, the electric control full-automatic operation with repeatability and accurate positioning is realized; and the automatic two-dimensional material transfer device is worthy of popularization.

Description

technical field [0001] The invention belongs to the field of automation, in particular to an automatic two-dimensional material transfer device. Background technique [0002] Two-dimensional materials, with their atomic-level thickness, provide the possibility to surpass the physical limits encountered by traditional materials at the nanoscale, and bring opportunities for the development of devices based on new principles. [0003] Stacking a variety of two-dimensional materials into a van der Waals heterojunction by artificially controllable methods is an effective way to explore novel states of two-dimensional materials and develop functional devices based on two-dimensional materials. In the process of constructing a van der Waals heterojunction, it is necessary to precisely control the transfer and stacking of two-dimensional materials and achieve a clean two-dimensional interface. [0004] In the process of assembling van der Waals heterojunctions, the current common p...

AI Technical Summary

Problems solved by technology

[0006] 1) The number of axes is small, the degree of freedom of adjustment is limited, and the control accuracy is low;

[0007] 2) Most of the fixation of samples and transfer glass slides is achieved by magnetic attraction, glue or mechanical fixation. Too many manual operations introduce more constraints to the transfer process of two-dimensional materials, which limits the transfer process. Control of the heating temperature prevents further automation of the transfer apparatus and limits the possibility of the transfer process being performed in an ultra-clean glove box

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