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A magnetic field generator suitable for vacuum coating equipment

A magnetic field generating device and vacuum coating technology, applied in the manufacture/processing of electromagnetic devices, electromagnets, etc., can solve the problems of small uniform magnetic field space and low magnetic field strength, and achieve the effect of saving limited lateral space

Active Publication Date: 2022-07-15
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this device occupies a large space in the vacuum equipment, and because the generated magnetic field is elliptical, the uniform magnetic field space generated by it is small, and the magnetic field strength that can be obtained is also low

Method used

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  • A magnetic field generator suitable for vacuum coating equipment
  • A magnetic field generator suitable for vacuum coating equipment
  • A magnetic field generator suitable for vacuum coating equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] By simulating the internal structure of the vacuum coating equipment, a wafer 5 with a diameter of 4 inches is placed horizontally in the center area of ​​a pair of spherically-cut pole heads (with a height of 60 cm). Among them, the shape of the pole head is made of a sphere with a diameter of 85cm, which is placed in the center of the wafer. By simulating an external excitation coil power supply, a magnetic field is generated in the central area. The excitation coil is a copper wire with a diameter of 2mm, and the number of turns is 400. By applying a current of 10A, a uniform magnetic field is generated in the center area of ​​the pole head.

[0036] By simulating magnetic fields such as Figure 4 It can be obtained that the magnetic field strength obtained in the area of ​​4 inches is (23.463-26.337) mT, and the uniformity is 89.1%.

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Abstract

The invention discloses a magnetic field generating device suitable for vacuum coating equipment, comprising: a ring magnetic circuit; a pair of excitation coils; a pair of iron cores; The sample stage can be embedded from the annular magnetic circuit without contact; the annular magnetic circuit is specifically a circular ring; the iron core can be bent when placed vertically; the pole head is a spherical section; the excitation coil is connected to an external Power supply for precise control of the generated magnetic field. The invention can effectively save the lateral limited space in the vacuum coating equipment; the intensity of the generated magnetic field can be precisely controlled; a uniformly distributed magnetic field can be generated in the preparation area; it is suitable for the preparation of large-sized wafer film stacks; Other required conditions (eg heating) for the preparation of circular membrane stacks adversely affect the preparation of high-quality magnetic chip stacks.

Description

technical field [0001] The invention relates to the field of vacuum coating equipment, in particular to a magnetic field generating device suitable for use in a sample stage of a vacuum equipment, for applying a uniform and controllable magnetic field when preparing a magnetic chip. Background technique [0002] As the core unit of highly reliable information storage (such as magnetic random access memory, etc.) and highly sensitive magnetic signal sensing (such as magnetoresistive sensors, etc.), magnetic chips have been widely used in aircraft and satellite control systems, as well as mobile phone electronic compasses, Auto-driving and other fields have become an indispensable basic element in information technology and the information industry. The functional film layer of the magnetic chip is usually prepared in a vacuum equipment. One of the key core technologies in the preparation process is that when the functional film stack is deposited, a highly uniform and control...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F7/06H01L43/12H10N50/01
CPCH01F7/06H10N50/01
Inventor 朱大鹏张学莹赵巍胜
Owner BEIHANG UNIV
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