Fast reflecting mirror based on macro-micro two-stage compound action

Abstract

The invention provides a fast reflecting mirror device based on macro-micro two-stage compound actuation. The fast reflecting mirror device comprises a base, a displacement sensor, a voice coil motor driving part serving as a macro actuation part, a piezoelectric ceramic combined bridge type displacement amplification mechanism serving as a micro actuation part, a flexible slender rod, a flexible hinge body, a movable table, a mirror frame assembly and a reflecting mirror. The macro actuation part of the voice coil motor provides a large stroke, the micro actuation part driven by the piezoelectric ceramics provides a small stroke and is ultrahigh in precision, and one micro actuation part and one micro actuation part are connected and combined into a macro-micro double-motion actuating mechanism through a bridge type amplification mechanism. The movable table is driven by the macro-micro two-stage actuating mechanism to drive the mirror frame reflecting mirror load to rotate around the X axis and the Y axis of the reflecting mirror plane, the displacement sensor detects and feeds back precise movement information of the load, and the flexible hinge body is provided with multiple hooke joints and can provide normal displacement of the mirror surface. The fast reflecting mirror device has the advantages of being large in stroke and ultrahigh in precision, and meanwhile, the mechanism can move in the three-degree-of-freedom direction.

Description

technical field [0001] The invention relates to a fast reflector based on macro-micro two-stage composite action, and belongs to the technical field of optical-mechanical structure design of fast reflector precision instruments. Background technique [0002] The fast mirror is an advanced optoelectronic device that adjusts the direction of the light beam by quickly and accurately controlling the deflection angle of the mirror surface. It is the core component that supports the new generation of information technology and key aerospace engineering technologies such as breakthroughs in precise transceiver matching control and ground calibration. One of them is widely used in fields requiring precise pointing, tracking and stabilization, such as space surveying and mapping, astronomical telescopes, laser detection and communication, adaptive optics, and boresight stabilization of optoelectronic devices. [0003] The rapid development of information technology and aerospace fiel...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the existing technology and provide a fast mirror based on macro-micro two-stage composite action, which can satisfy large travel, ultra-high precision, and has strong bearing capacity and strong resistance. It has the advantages of good impact performance, and can effectively solve the problem that the existing fast mirrors cannot take into account the large travel range and ultra-high precision. At the same time, it can better protect the structure of the fast mirror when encountering strong impacts during transportation or launch.

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