A series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform

Abstract

The invention discloses a series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform, which solves the problems that the traditional optical element adjustment platform cannot simultaneously take into account the multi-degree-of-freedom precision adjustment, and the adjustment platform itself has low complexity and high reliability. , the platform includes a support base, a first-level adjustment mechanism and a second-level adjustment mechanism; the optical element can be driven to translate along the Z direction and rotate around the X and Y directions through the first micro-nano-level driving component in the first-level adjustment mechanism. The second micro-nano-level driving component in the secondary adjustment mechanism can drive the optical element to translate along the X and Y directions, so as to realize the multi-dimensional and high-precision adjustment of the spatial position of the optical element in the optical system, thereby improving the performance index of the optical system.

Description

technical field [0001] The invention relates to an adjustment platform for optical elements, in particular to a series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform. Background technique [0002] The photoelectric measurement system / equipment is an important support in the fields of national defense, scientific exploration, and social and people's livelihood, and the optical system is the eye of the photoelectric measurement device, and its performance indicators determine the efficiency of the photoelectric measurement system / equipment. In essence, the optical system controls and redistributes light energy through the precise layout of different forms of optical components. The realization of its performance indicators depends on the high-precision (um, nm) spatial arrangement of the optical components. [0003] The complexity and motorization of non-cooperative space targets require a relatively larger field of view and higher line-...

AI Technical Summary

Problems solved by technology

[0008] In order to solve the problem that the traditional optical element adjustment platform cannot take into account the precise adjustment of multiple degrees of freedom at the same time, and the adjustment platform itself has low complexity and high reliability, the present invention provides a series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform

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