The invention discloses an inchworm-type precise linear micro-
actuator based on a complaint mechanism. The inchworm-type precise linear micro-
actuator comprises driving mechanisms, two clamping mechanisms and stators, wherein each driving mechanism consists of four symmetrically arranged driving
branch chains and one pair of stators, each driving
branch chain consists of two lever structures, the driving
branch chains are connected to the stators by adopting flexible hinges, and reciprocating micromovement can be performed relative to the stators; each clamping mechanism consists of three pairs of flexible hinges, one pair of levers and one pair of clamping pieces which are symmetrically arranged, and the two clamping mechanisms are symmetrically connected to two ends of each driving mechanism through the levers; the stators are of long and thin cylinder-shaped structures, are arranged at the symmetrical center of the micro-
actuator, are matched with the clamping mechanisms through holes, are matched with the driving mechanisms through through grooves, and can move in the holes and the through grooves. The clamping mechanisms are driven by the driving mechanisms to carry out
reciprocating motion, and the stators are driven by the clamping mechanisms to perform a bionic inchworm motion law in the motion manner of
linear motion. The disclosed micro-actuator can be used in the fields of ultra-precision
machining,
precision engineering, micro electro mechanical systems, bioengineering,
semiconductor manufacturing and the like.