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An inchworm precision rotary micro-actuator based on a compliant mechanism

A compliant mechanism and micro-drive technology, applied in the field of precision micro-operation, can solve the problems of small output load, poor motion stability, and low running speed, and achieve the effects of large single-step output displacement, large clamping force, and fast motion speed

Active Publication Date: 2020-04-03
江苏康耐特精密机械有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current inchworm linear actuator still has problems such as low operating speed, small output load, and poor motion stability.

Method used

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  • An inchworm precision rotary micro-actuator based on a compliant mechanism
  • An inchworm precision rotary micro-actuator based on a compliant mechanism
  • An inchworm precision rotary micro-actuator based on a compliant mechanism

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Experimental program
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Effect test

Embodiment

[0045] The design principle of an inchworm-type precision rotary micro-driver based on a compliant mechanism is as follows: Figure 9 As shown, the drive unit includes a first drive unit 1 and a second drive unit 3, which are respectively connected to the fixed bracket by bolts; the clamp unit includes a first clamp unit 2 and a second clamp unit 4, which are fixedly connected to the fixed bracket by bolts respectively. The first driving unit 1 and the second driving unit 3; the output unit 5 is matched with the clamping unit, the driving unit and the bracket by using round holes.

[0046] The working process of the above-mentioned structure imitating the law of motion of the inchworm is as follows:

[0047] Figure 9 (a) indicates that the rotary microdriver is in a non-working state; Figure 9 (b) indicates that the first clamping unit 2 is in the working state, and the unit clamps the output unit 5; Figure 9 (c) indicates that the first driving unit 1 is in the working ...

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Abstract

The invention discloses an inchworm precision rotary micro-driver based on a compliant mechanism, which comprises two driving mechanisms, two clamping mechanisms, a mover and a bracket, wherein the two driving mechanisms, namely, the first driving mechanism and the second driving mechanism, are the same in structure; the two clamping mechanisms, namely, the first clamping mechanism and the secondclamping mechanism, are the same in structure; the two driving mechanisms are respectively located at two sides, and the two clamping mechanisms are located between the two driving mechanisms; the mover is located on the bracket and placed at the symmetry center of the rotary micro-driver and mutually cooperated with the mechanisms through an output hole; the clamping mechanisms can clamp or release the mover; when the clamping mechanisms clamp the mover, the mover rotates along with the clamping mechanisms; and when the clamping mechanisms release the mover, the mover moves freely. The micro-driver provided by the invention has the advantages of large travel, high resolution, large output load, bidirectional movement and the like.

Description

technical field [0001] The invention belongs to the technical field of precision micro-operation, and in particular relates to an inchworm-type precision rotary micro-driver based on a compliant mechanism, which is mainly used in ultra-precision machining, precision engineering, micro-electromechanical systems (MEMS), microelectronic engineering, biological engineering, and semiconductor manufacturing and other high-tech fields of science and technology. Background technique [0002] With the rapid development of micro-machining, ultra-precision machining and measurement, precision optical engineering, bioengineering, modern medicine, semiconductor manufacturing, aerospace and other fields, the traditional driver is limited by its working principle and mechanical structure and cannot meet the needs of ultra-precision. and high-precision positioning requirements, there is an urgent need for ultra-precise linear micro-drivers with nanometer and sub-nanometer precision to reali...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/02H02N2/04
CPCH02N2/023H02N2/043H02N2/046
Inventor 胡俊峰何建康杨展宏
Owner 江苏康耐特精密机械有限公司
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