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Piezoelectric driving large-stroke no-coupling two-dimensional precise micro locating platform

A micro-positioning platform, piezoelectric drive technology, applied in the parts, instruments and other directions of the instrument, can solve the problem of small stroke, and achieve the effect of not needing lubrication, eliminating coupling, and increasing displacement.

Inactive Publication Date: 2017-02-01
SHENYANG POLYTECHNIC UNIV
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

At present, most displacement tables use the principle of lever amplification to increase the displacement, but the lever amplification will produce kinematic coupling at the same time, and the stroke is relatively small

Method used

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  • Piezoelectric driving large-stroke no-coupling two-dimensional precise micro locating platform

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Embodiment Construction

[0022] As shown in the figure, the present invention provides a piezoelectric-driven large-stroke non-coupling two-dimensional precision micro-positioning platform, which includes an outer support 1, a diamond-shaped displacement amplification mechanism, a piezoelectric ceramic driver, a symmetrical long-arm hinge, an inner layer Substrate 5 and workbench 6; workbench 6 is nested on the inner substrate 5, one end of the workbench 6 in the Y direction is connected to the inner substrate 5 through a Y-direction symmetrical long-arm hinge 4-1, and the other end of the workbench 6 in the Y direction The inner substrate 5 is connected through the Y-direction diamond-shaped displacement amplification mechanism; the inner substrate 5 is nested on the outer support 1, and one end of the inner substrate 5 in the X direction is connected to the outer support 1 through the X-direction long-arm hinge 4-2 , the other end of the X-direction of the inner substrate 5 is connected to the outer ...

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Abstract

Disclosed is a piezoelectric driving large-stroke no-coupling two-dimensional precise micro locating platform. The piezoelectric driving large-stroke no-coupling two-dimensional precise micro locating platform is characterize in that the platform comprises an outer layer support seat, a rhombus displacement magnifying mechanism, a piezoelectric ceramic actuator, symmetrical long arm hinges, an inner layer base plate and a workbench; and compared with the prior art, the platform has the advantages that 1, X-direction and Y-direction independent motion can be achieved, and X-direction and Y-direction simultaneous motion can also be achieved; 2, the maximum displacement output quantities in the X direction and the Y direction are close; 3, displacement quantity can be increased, coupling is eliminated, and error is reduced; and 4, the platform has the advantages that mechanical friction, delaying and clearance are avoided, lubrication is not needed, heat and noise are not produced, and the motion resolution is high.

Description

technical field [0001] The invention relates to a two-dimensional precision micro-positioning platform driven by piezoelectricity and large stroke without coupling, belonging to the field of micro-electromechanical control systems. Background technique [0002] In recent years, with the rapid development and progress of science and technology, human research has expanded from the macroscopic field to the microscopic field, especially in many disciplines such as micro-electromechanical systems, bioengineering, microelectronics technology, optics, etc. With the development of miniaturization and miniaturization, it has entered the submicron-nano era, so the performance requirements for precision machinery and instruments are getting higher and higher, and urgent requirements are put forward for the development of high-precision micro-displacement operating systems. Require. As a typical representative and one of the key technologies of precision machinery and precision instru...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 孙凤陆鹤徐方超金俊杰
Owner SHENYANG POLYTECHNIC UNIV
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