Planar structure three-degree-of-freedom micro-nano positioning platform and using method thereof

Abstract

The invention discloses a planar structure three-degree-of-freedom micro-nano positioning platform and a using method thereof, solves the problems that in the prior art, a whole positioning platform is not compact enough in structure and large in occupied space, and has the beneficial effect of improving the compactness of the platform. According to the specific scheme, the planar structure three-degree-of-freedom micro-nano positioning platform comprises a bottom plate, an XY-direction upper-layer positioning mechanism and a Z-direction lower-layer positioning mechanism; the XY-direction upper-layer positioning mechanism comprises a base body installed on the bottom plate, the base body is provided with a Y-direction amplification mechanism arranged in the Y direction and an X-direction amplification mechanism arranged in the X direction, the output tail ends and the opposite sides of the Y-direction amplification mechanism and the X-direction amplification mechanism are each provided with a first-stage guide mechanism, the multiple first-stage guide mechanisms are arranged on the edge of the top of a cavity, and a plurality of groups of second-stage guide mechanisms are supported in the cavity and are arranged in a crossed manner; and the Z-direction lower-layer positioning mechanism is installed on the bottom plate, and the Z-direction lower-layer positioning mechanism is installed in the XY-direction upper-layer positioning mechanism in a nested mode.

Description

technical field [0001] The invention relates to the field of micro-nano positioning platforms, in particular to a planar structure three-degree-of-freedom micro-nano positioning platform and a use method. Background technique [0002] The statements in this section merely provide background information related to the present invention and do not necessarily constitute prior art. [0003] With the continuous development of nanotechnology and MEMS, precise positioning technology has gradually become an active research hotspot. As the key device of precision positioning technology, the ultra-high-precision flexible micro-nano positioning platform has the advantages of no friction, no wear, no gap, no lubrication, and easy manufacturing compared with traditional mechanisms based on rigid connecting rods, gears, and hinges. It has been widely used in scanning probe microscopy, biological cell manipulation, micro-nano manufacturing, optical fiber calibration and other fields. In...

AI Technical Summary

Problems solved by technology

The inventors found that because the existing three-degree-of-freedom micro-nano positioning platforms mostly adopt the form of vertically designed Z-direction positioning platforms, the entire positioning platform is too long, the structure is not compact enough, and it takes up a large installation space

In addition, the positioning platform also has the disadvantages of small Z-direction travel, easy coupling between Z-direction motion and XY-direction motion, etc.

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