A three-degree-of-freedom micro-nano positioning platform with a planar structure and a method of using the same

Abstract

The invention discloses a planar structure three-degree-of-freedom micro-nano positioning platform and its use method, which solves the problems in the prior art that the structure of the entire positioning platform is not compact enough and occupies a large space, and has the beneficial effect of increasing the compactness of the platform. The specific scheme As follows: a planar structure three-degree-of-freedom micro-nano positioning platform, including a base plate; an XY-upward positioning mechanism, and an XY-upward positioning mechanism includes a base mounted on the base plate, and the base is provided with a Y-direction amplification mechanism set in the Y direction and a Y-direction amplification mechanism set in the X direction. The X-direction amplifying mechanism, the output end of the Y-direction amplifying mechanism and the X-direction amplifying mechanism and the opposite sides of the two are respectively equipped with a first-level guiding mechanism, and multiple sets of first-level guiding mechanisms are arranged on the top edge of the chamber. Multiple sets of second-level guiding mechanisms are supported, and multiple sets of second-level guiding mechanisms are arranged crosswise; the Z-downward positioning mechanism is installed on the bottom plate, and the Z-downward positioning mechanism is nested and installed in the XY-upward positioning mechanism.

Description

Technical field [0001] The present invention relates to a micro-nano positioning stage, and in particular three degrees of freedom is a planar structure and micro-nano positioning stage use. Background technique [0002] The statement of this section is merely the background technology information associated with the present invention, which is not necessarily constituted in prior art. [0003] With the development of nanotechnology and micro-electromechanical systems, precision positioning technology gradually become an active research focus. Ultra-precision positioning stage of the flexible micro-nano precision positioning device as a key technology, based on the conventional rigid link mechanism, gears, friction hinge has no comparison, no wear, no gap, no lubrication, the advantages of simple manufacture, and has been widely used in the field of a scanning microscope, the operation of biological cells, the micro-nano manufacturing, calibration and other fiber optic probe. Esp...

AI Technical Summary

Problems solved by technology

Since the existing three-degree-of-freedom micro-nano positioning platforms mostly adopt the form of vertically designed Z-direction positioning platforms, the entire positioning platform is too long, the structure is not compact enough, and it takes up a large installation space

In addition, the positioning platform also has the disadvantages of small Z-direction travel, easy coupling between Z-direction motion and XY-direction motion, etc.

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