A three-degree-of-freedom micro-nano positioning platform with a planar structure and a method of using the same
A planar structure, micro-nano positioning technology, applied in the direction of instruments, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc., can solve the problem of small Z travel of the positioning platform, long positioning platform, and insufficiently compact structure and other problems to achieve the effect of ensuring accuracy, compact structure and easy processing
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[0039] It should be noted that the following detailed description is illustrative and is intended to provide a further description of the invention. All techniques and scientific terms used in the present invention have the same meaning as commonly understood by those of ordinary skill in the art of the present invention.
[0040] Note that the terminology used herein is for the purpose of describing particular embodiments only, not intended to limit the exemplary embodiments of the present invention. As used herein, unless the present disclosure expressly indicated otherwise, the singular forms are intended to include plural forms as well, in addition, also to be understood that, when used in the present specification "comprises" and / or "including" when used herein, which specify the presence of stated features, steps, operations, devices, components, and / or combinations thereof;
[0041] For convenience of description, "upper", "lower", "left", "right", if the word appears i...
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