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Superconducting digital circuit structure capable of inhibiting quasi-particle poisoning and manufacturing method thereof

A technology of digital circuits and manufacturing methods, applied in the field of superconducting quantum, can solve the problems of quasi-particle poisoning of superconducting digital circuits, and achieve the effect of reducing loss

Pending Publication Date: 2022-01-14
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a superconducting digital circuit capable of suppressing quasiparticle poisoning and its manufacturing method, which is used to solve the problem of quasiparticle poisoning in superconducting digital circuits in the prior art

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  • Superconducting digital circuit structure capable of inhibiting quasi-particle poisoning and manufacturing method thereof
  • Superconducting digital circuit structure capable of inhibiting quasi-particle poisoning and manufacturing method thereof
  • Superconducting digital circuit structure capable of inhibiting quasi-particle poisoning and manufacturing method thereof

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Embodiment 1

[0054] The superconducting digital circuit structure capable of suppressing quasiparticle poisoning of the present invention includes a substrate, a superconducting structure and a normal metal layer; the superconducting structure is arranged on the substrate 10, and the normal metal layer is electrically connected to the superconducting The bottom electrode 111 of the conductive structure, and the normal metal layer 00 is used to suppress the quasi-particles generated by the superconducting digital circuit.

[0055] Based on the above principles, the present invention proposes a superconducting digital circuit structure that can suppress quasiparticle poisoning. The superconducting digital circuit structure manufactures normal metal traps that can suppress quasiparticle poisoning through normal metal layers, which can reduce and reduce the generation of quasiparticles to achieve the effect of suppressing quasiparticle poisoning.

[0056] The superconducting structure of the p...

Embodiment 2

[0082] In order to solve the above-mentioned technical problems, the present invention also provides a method for manufacturing a superconducting digital circuit structure that can suppress quasiparticle poisoning, and the method for manufacturing at least includes the following steps:

[0083] S1, providing the substrate,

[0084] The substrate in this embodiment serves as the structural basis of the entire superconducting digital circuit structure;

[0085] S2, sequentially forming three layers of films on the surface of the substrate, and etching the three layers of films to form a Josephson junction, the Josephson junction includes a bottom electrode, a first insulating material layer and a top electrode; the first insulating material layer is set between the bottom electrode and the top electrode; the bottom electrode is disposed on the substrate;

[0086] The three-layer film in this step is the bottom electrode (L1 layer), the first insulating material layer (L2 layer)...

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Abstract

The invention provides a superconducting digital circuit structure capable of inhibiting quasi-particle poisoning and a manufacturing method thereof. The circuit structure comprises a substrate, a superconducting structure and a normal metal layer, wherein the superconducting structure is arranged on the substrate, the normal metal layer is electrically connected with a bottom electrode of the superconducting structure, the normal metal layer is used for inhibiting quasi-particles generated in the manufacturing of the superconducting digital circuit, and the quasi-particles are electrons after Cooper pairs are disassembled. According to the superconducting digital circuit, quasi-particle poisoning in the superconducting digital circuit can be effectively inhibited.

Description

technical field [0001] The invention relates to a superconducting quantum technology, in particular to a superconducting digital circuit structure capable of suppressing quasi-particle poisoning and a manufacturing method thereof. Background technique [0002] For superconducting quantum circuits, the generation and existence of quasi-particles (quasi-particles refer to electrons after the Cooper pair has been disassembled) will bring harm and cause quasi-particle poisoning. For example, first of all, quasiparticles are a source of loss, which will cause the relaxation of superconducting qubits and the reduction of the quality factor of superconducting resonant cavities, and because quasiparticles themselves have charges, they will disturb quantum systems that are sensitive to charges, such as making The frequency of the qubits changes causing phase decoherence. Therefore, in superconducting quantum circuits, it is necessary to avoid the occurrence of quasiparticle poisonin...

Claims

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Application Information

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IPC IPC(8): H01L39/02H01L39/24
CPCH10N60/805H10N60/0912
Inventor 林志荣刘匡
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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