X-ray fluorescence analyzer

Abstract

The present invention relates to an X-ray fluorescence analyzer, comprising: a sample box which accommodates a liquid sample; an X-ray generating part which emits X-rays to an inner side surface of the sample box; and a detector which detects fluorescent X-rays and which is disposed along a side surface of the sample box such that a distance formed by fluorescent X-rays emitted from the inside of the sample box to the outside of the sample box is shortest, so as to minimize absorption of the fluorescent X-rays emitted to the outside of the sample box into the air when the fluorescent X-rays are emitted to the outside of the sample box as a result of the reaction between the X-rays emitted from the X-ray generating part and the liquid sample in the sample box. According to the present invention, X-rays are emitted as close as possible to the inner wall side of the sample box to minimize the absorption by the liquid phase sample and increase the emitted fluorescent X-rays, so that a target element can be measured more precisely in an atmospheric environment without evacuation. In addition, the present invention employs a structure in which a secondary target is disposed and a characteristic X-ray generated from the target is emitted to the sample again, so that radiation that is inevitably wasted is returned to the inside of the sample box, thereby increasing the efficiency thereof.

Description

technical field [0001] The present invention relates to an X-ray fluorescence analyzer for measuring elements contained in a liquid sample, and more specifically, to an X-ray fluorescence analyzer that irradiates X-rays in a state of maximal adjacency with the inner wall surface of an adjoining sample box. X-ray fluorescence analyzers that amplify emitted fluorescent X-rays while minimizing absorption, and can measure target elements in an atmospheric environment without vacuum exhaust. Background technique [0002] Recently, with the global demand for environmentally friendly products and the increase in resource-recycling consumption structures, measurement equipment that can qualitatively / quantitatively analyze materials throughout the entire process of producing products is being developed. [0003] Among them, the X-ray fluorescence analysis device using X-rays can non-destructively analyze the substance to be measured, simplify the pretreatment process of the substance...

AI Technical Summary

Problems solved by technology

[0005] When analyzing the concentration of light elements such as sulfur using normal X-rays, in order to minimize the absorption by oxygen and nitrogen in the air, such as figure 1 As shown, in order to make the measurement environment into a vacuum, it is necessary to prepare a vacuum chamber and arrange the sample inside, but it takes a long time to create a vacuum in the vacuum chamber

[0006] Moreover, in the process of irradiating X-rays, the fluorescent X-rays expressed inside the sample box are arranged far outside the sample box, so they cannot penetrate in a state where the expressed fluorescent X-rays cannot have sufficient energy. to the outside, difficulties arise in accurately analyzing the elements

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