Mask plate cleaning device and method

Abstract

The invention discloses a mask plate cleaning device and method. The mask plate cleaning device comprises an openable and closable cleaning tank, a medicament circulating distillation part, a mask plate fixing jig and a jig hoisting and propelling mechanism, the medicament circulating distillation part supplies a medicament for cleaning a mask plate loaded on the openable and closable cleaning tank to a spraying pipe in the openable and closable cleaning tank through a medicament supply pipeline, the mask plate fixing jig is used for loading and fixing the mask plate and is loaded on the rotating part, the jig hoisting and propelling mechanism comprises a feeding mechanism and a hoisting mechanism, the hoisting mechanism puts or lifts the mask plate fixing jig loaded with the mask plate out of the openable and closable cleaning tank, the feeding mechanism propels the hoisting mechanism to translate, and the mask plate fixing jig is correspondingly put into the openable and closable cleaning tank filled with different types of medicaments, so the mask can be cleaned by mixing a cleaning agent and a non-cleaning agent in different proportions, 180-degree reversing cleaning of the mask can be achieved through the rotating part, and the cleaning effect is good.

Description

technical field [0001] The invention belongs to the technical field of mask plate cleaning, and in particular relates to a mask plate cleaning device and method. Background technique [0002] In the current OLED (Organic Light-Emitting Diode, organic electroluminescent diode) technology, the precision and quality of the metal mask used for vacuum evaporation will directly determine the display effect and quality of OLED products. For masks, especially fine metal masks, as the material gradually condenses and accumulates, the opening size will be reduced, and the sagging of the mask strip will increase, resulting in poor precision and shape of the evaporation area. In the evaporation process, the mask must be cleaned of organic materials and particles before recycling. At present, metal mask cleaning equipment generally uses a combination of multiple solvents, and each agent is equipped with multiple cleaning tanks. The cleanliness of the solution in each tank is different. ...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a mask cleaning device and method. The purpose is to improve the high cost caused by the current mask cleaning equipment equipped with a large number of chemicals, and to use immersion cleaning to finally attach the mask to the remaining chemicals. And the problem that the medicine in the gap between the lower mask strip and the mask frame cannot be removed

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