Mathematical processing method for defocusing element surface distribution image
A technology of mathematical processing and surface distribution, applied in image data processing, image enhancement, image analysis, etc., can solve problems such as small pixel spacing and image resolution that cannot be set too high, and achieve the effect of overcoming sample stage drift.
Pending Publication Date: 2022-02-08
SECOND INST OF OCEANOGRAPHY MNR
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Problems solved by technology
[0003] The sample stage scanning mode is not suitable for mapping the element surface distribution under high magnification because it is easily affected by the drift of the sample stage. Moreover, due to the limitation of technology and time cost, the image resolution cannot be set too high, and the pixel pitch cannot be set too high. Set too small (≥0.02μm)
The electron beam scanning mode avoids the mechanical loss caused by the frequent movement of the sample stage during the imaging process, and the image resolution and pixel pitch can be theoretically unlimited, but it is limited when the magnification is lower than 2000-3000. Influence of focal effect
Method used
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Embodiment 1
[0040] Step 1: Prepare light sheet or sheet;
[0041] Select microbeam analysis standard samples with larger particle size (recommended particle size ≥ 2mm) and samples to be tested for inlaying, grinding and polishing, and make them into light or thin slices. The surface of the samples is required to be clean and smooth. It is recommended that the specification of the light sheet should not exceed 20mm long x 20mm wide x 10mm high, and the specification of the thin film is generally 50mm long x 25mm wide x 2mm high. Before the test, a carbon film with a thickness of 20 nm was evaporated on the surface of the sample.
[0042] Step 2: Select the JXA-8100 electronic probe from Japan Electronics Corporation, turn it on, and debug the instrument after the beam current is stable.
[0043] Step 3: Under the same experimental working conditions and configuration parameters, collect element surface distribution maps for the standard sample and the sample to be tested;
[0044] Speci...
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The invention belongs to the field of electronic probe analysis technology image processing, and discloses a mathematical processing method of a defocusing element surface distribution image. The invention provides a mathematical processing method for obtaining a surface distribution image from standard samples with flat and clean surfaces and elements uniformly distributed, extracting correction factors from the samples and applying the factors to element surface distribution images, of a same kind, collected under same experimental conditions, thereby eliminating the defocusing effect. The characteristic that the element concentration or counting intensity is regularly reduced from an optimal focal line to isofocal lines parallel to the optimal focal line on the two sides is specifically utilized, corresponding correction factors are obtained through an element surface distribution image of standard samples, then the element surface distribution image, of the same kind, collected under same experiment conditions are corrected, and finally, a real state of the element surface distribution image of to-be-detected samples is recovered; a result shows that the processed element surface distribution image is basically consistent with an image obtained by using a scanning mode of a sample stage.
Description
technical field [0001] The invention relates to the related technical field of electronic probe analysis technology image processing, and more specifically, relates to a mathematical processing method of an electronic probe-spectrometer defocused element surface distribution map. Background technique [0002] Since the two-dimensional distribution state of the element content on the surface of the sample can be displayed intuitively, the surface distribution becomes Figure 1 It has been one of the main functions of electron probe analysis technology, and it has been widely used in research fields such as geology, materials, environment, and paleontology. Both sample stage scanning and electron beam scanning methods can obtain element surface distribution images. The former is that the electron beam is fixed and the sample stage moves in a plane perpendicular to the electron beam, and the latter is that the sample stage is fixed and the electron beam is on the rectangular are...
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IPC IPC(8): G06T5/00
CPCG06T2207/10056G06T5/80G06T5/70
Inventor 朱继浩
Owner SECOND INST OF OCEANOGRAPHY MNR