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Calibration piece preparation method and calibration piece

A technology for calibrating parts and cross-sectional dimensions, applied in measuring devices, instruments, measuring electrical variables, etc., can solve problems such as calibration parts deviation, and achieve the effect of overcoming deviation, improving design success rate and efficiency, and increasing attenuation

Pending Publication Date: 2022-03-01
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The embodiment of the present invention provides a method for preparing a calibration piece and the calibration piece, so as to solve the problem of deviation of the calibration piece that occurs when the electromagnetic simulation model is used to prepare the calibration piece in the prior art

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  • Calibration piece preparation method and calibration piece
  • Calibration piece preparation method and calibration piece
  • Calibration piece preparation method and calibration piece

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Embodiment Construction

[0056] In the following description, specific details such as specific system structures and technologies are presented for illustration rather than limitation, so as to thoroughly understand the embodiments of the present invention. It will be apparent, however, to one skilled in the art that the invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.

[0057] In order to make the purpose, technical solution and advantages of the present invention clearer, specific embodiments will be described below in conjunction with the accompanying drawings.

[0058] figure 1It is an implementation flow chart of a method for preparing a calibrator provided in an embodiment of the present invention. The calibrator generally includes five types of calibrator: SOLT, LRRM, LR...

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PUM

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Abstract

The invention provides a calibration piece preparation method and a calibration piece. The method comprises the steps of determining the cross section size of a transmission line; when the cross section size meets a preset calibration piece frequency requirement, optimizing the cross section size to obtain an optimal cross section size; setting a plurality of groups of transmission lines based on the optimal cross section size, determining a target transmission line with characteristic impedance closest to a preset impedance value in the plurality of groups of transmission lines, and determining a corresponding calibration piece size based on the target transmission line; and carrying out semiconductor process processing according to the sizes of the calibration parts, carrying out laser resistance trimming on the resistance of the load calibration parts in the processed calibration parts, and carrying out value setting on all the calibration parts after resistance trimming. The design success rate and efficiency can be improved, and deviation caused by process errors is effectively overcome.

Description

technical field [0001] The invention relates to the technical field of microwave characteristic measurement of wafer-level semiconductor devices, in particular to a method for preparing a calibration piece and the calibration piece. Background technique [0002] A large number of "on-wafer S-parameter test systems" equipped in the microelectronics industry need to use on-wafer calibration components combined with corresponding calibration methods for vector error correction before use. The vector network analyzer calibration used to characterize the performance of transistors generally uses commercial impedance standards (ISS), specifically including open-short-load-thru (SOLT) calibration parts fabricated on ceramic substrates, transmission line-reflection-matching (LRM ) calibration parts, transmission line-reflection-reflection-matching (LRRM) calibration parts, etc. ISS is characterized by low cost, ease of use and durability. [0003] The transmission line structure i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R35/00
CPCG01R35/007
Inventor 王一帮霍晔吴爱华梁法国栾鹏刘晨孙静李彦丽
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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