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Method and device for acquiring grating structure data and readable storage medium

A grating structure and data technology, applied in the optical field, can solve the problems of low accuracy of grating structure data and no consideration of processing errors, etc.

Pending Publication Date: 2022-03-11
GOERTEK INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, this implementation method does not consider the actual processing error, so that the accuracy of the obtained grating structure data is not high

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  • Method and device for acquiring grating structure data and readable storage medium
  • Method and device for acquiring grating structure data and readable storage medium
  • Method and device for acquiring grating structure data and readable storage medium

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Embodiment Construction

[0027] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement, digital expression and numerical value of the components and steps set forth in these embodiments are not limited unless otherwise specified.

[0028] The following description of at least one exemplary embodiment is actually illustrative only, and it is not necessary to use any limitation of the invention and its application or use.

[0029] For technical, methods, and equipment known to those of ordinary skill in the art may not be discussed in detail, in appropriate, the techniques, methods, and equipment should be considered part of the specification.

[0030] In all examples shown in and discussed herein, any specific value should be construed as merely exemplary, not the limitation. Therefore, other examples of exemplary embodiments may have different values.

[0031] It should be noted t...

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Abstract

The invention relates to a method and device for obtaining grating structure data and a readable storage medium, and the method comprises the steps: obtaining the first diffraction efficiency data of a to-be-detected grating, and enabling the first diffraction efficiency data to be obtained through detection; obtaining first grating structure data of the grating to be measured according to a target model and the first diffraction efficiency data; wherein the target model is a model obtained by adjusting model parameters of a set model according to second grating structure data and second diffraction efficiency data of a set grating, and the grating type of the to-be-measured grating is the same as that of the set grating. The second grating structure data and the second diffraction efficiency data are obtained through detection, and the diffraction efficiency data obtained according to the second grating structure data and the target model and the second diffraction efficiency data meet set matching requirements.

Description

Technical field [0001] Embodiments of the present disclosure relate to the field of optics, and more particularly to a method, apparatus, and readable storage medium that acquires grating structure data. Background technique [0002] During the nano-manufacturing process, it is of great significance to accurately characterize the geometric feature parameters of nanostructured products (such as gratings). [0003] At present, in the model training stage, the model can be trained in combination with the design structure data of the grating and the measured diffraction efficiency data. Further, in the product test phase, the raster structure data to be measured is obtained based on the model and the measured diffraction efficiency data to be measured to be measured. [0004] However, this implementation does not consider the actual processing error, so that the accuracy of the obtained grating structure data is not high. Inventive content [0005] One object of the embodiment of th...

Claims

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Application Information

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IPC IPC(8): G06F30/27G06N3/04G06N3/08G06F111/14
CPCG06F30/27G06N3/04G06N3/08G06F2111/14
Inventor 刘艺朱春霖董立超刘宝山金成滨代杰吾晓饶轶
Owner GOERTEK INC
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