Top plate assembly and motion positioning device with same

Abstract

The invention provides a top plate assembly and a motion positioning device with the top plate assembly, the top plate assembly is arranged on a mounting plate of the motion positioning device for bearing and positioning a workpiece, and the top plate assembly comprises a top plate arranged above the mounting plate for bearing the workpiece; the top plate is movably connected with the top plate guide rails on the mounting plate through the plurality of top plate sliding blocks positioned below the top plate so as to move relative to the mounting plate under the interaction of the top plate motor stator and the top plate motor rotor; the top plate motor stator is mounted on the mounting plate, and the top plate motor rotor is connected with the top plate through the adapter; the adapter comprises a plurality of supporting parts, the supporting parts are in point contact with the top plate, the contact points are located over the top plate sliding block, and the top plate provides vertically-upward supporting force for the adapter through the contact points. The problem that the motion precision of an XY motion platform in the prior art is reduced due to the influence of magnetic attraction force between a stator and a rotor of a motor is solved.

Description

Technical field [0001] The present invention relates to the technical field of wafer detecting equipment, and more particularly to a top plate assembly and a moving positioning device having it. Background technique [0002] In the field of manufacture or detection of semiconductor wafers, the workpiece is required to carry the silicon wafer to complete the fine positioning of the silicon wafer to facilitate the manufacture or detection of the silicon wafer. Therefore, in a workpiece table apparatus applied or detected by a silicon sheet, a two-axis motion device having a silicon wafer in X, Y2D plane is its core component. [0003] The development of the semiconductor industry is accompanied by continuous improvement of the manufacturing or detection efficiency of the silicon wafer and the requirements of manufacturing or detection accuracy, therefore, the operational speed, acceleration and performance of the two-axis moving device for carrying the silicon wafer also needs to b...

AI Technical Summary

Problems solved by technology

[0006] The main purpose of the present invention is to provide a top plate assembly and its motion positioning device to solve the problem that the motion accuracy of the XY motion table in the prior art will be reduced due to the influence of the magnetic attraction force between the stator and the mover of the motor question

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