Digital image feeler vector coordinate transform calibration and error correction method and its device

Abstract

The invention discloses a method for the calibration of vectorial coordinate transformation and the modification of errors of a digital image probe, and a device thereof; the noncontact optical measurement principle is adopted to realize the precise calibration and accurate modification of errors of the image probe in high-accurate two-dimensional measurement and ensure an accurate measurement result. The method of calibration is realized completely on the basis of the measuring principle of the image probe, without the existence of the errors of calibration principle. The process of calibration is based on the self-calibration principle, a virtual calibration point is formed by fixing a target object and moving the probe, then the calibration operation is fulfilled by constructing a vector, therefore, the operability of equipment is improved; by calculating the position of the image optical centre of an probe image sensor to be taken as the calibration origin, a new measurement error caused by the offset of a coordinate system is avoided to be introduced after the multiplying power of the probe is adjusted, the requirements of measurement in different application situations are ensured, and as the probe self-calibration technology is adopted, the calibration of the probe is ensured to have very high accuracy; the error self-modification is realized by moving a precise three-dimensional moving mechanical device to extract error meshes.

Description

technical field

[0001] The invention relates to a digital image measuring head vector coordinate transformation calibration and error correction method and device thereof. Background technique

[0002] Digital image measurement can be widely used in actual production and life, and has very obvious measurement advantages for small and thin workpieces. Digital image measurement adopts the principle of optical triangulation, and reflects the displacement δ of the object point on the measured plane through the displacement Δ of the image point on the area array CCD photosensitive chip, so as to realize the measurement of the measured size in the lens focal plane. Digital image measurement technology has a very wide range of applications in precision measurement, microscopic size and structure detection, and other precision optical testing fields, and has very important application requirements and values.

[0003] Its schematic diagram (only one section is given in the figure) ...

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