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Microelectromechanical device having structure tilted by piezoelectric actuation about two axes of rotation

An actuation structure, micro-electromechanical technology, applied to piezoelectric effect/electrostrictive or magnetostrictive motors, microstructure devices composed of deformable elements, generators/motors, etc., can solve high power consumption And other issues

Pending Publication Date: 2022-04-12
STMICROELECTRONICS SRL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Electrostatic actuation systems typically use high operating voltages, while electromagnetic actuation systems typically require high power consumption

Method used

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  • Microelectromechanical device having structure tilted by piezoelectric actuation about two axes of rotation
  • Microelectromechanical device having structure tilted by piezoelectric actuation about two axes of rotation
  • Microelectromechanical device having structure tilted by piezoelectric actuation about two axes of rotation

Examples

Experimental program
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Effect test

Embodiment Construction

[0046] figure 2 is a schematic diagram of a MEMS (Micro Electro Mechanical System) device 10 according to a first embodiment, in particular a mirror device of the vector scanner type.

[0047] The microelectromechanical device 10 is formed in a die of semiconductor material, especially silicon, and is provided with a tiltable structure 12 . The tiltable structure has a main extension in the horizontal plane XY and is drivable to rotate about a first axis of rotation A1 and a second axis of rotation A2, wherein the first axis of rotation A1 is parallel to the first horizontal axis X of the aforementioned horizontal plane XY, The second axis of rotation A2 is parallel to the second horizontal axis Y of the horizontal plane XY and together with the first horizontal axis X defines the aforementioned horizontal plane XY (in the embodiment shown the sides of the die are also parallel to the horizontal axes X, Y).

[0048] As will be discussed below, the tiltable structure 12 can a...

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PUM

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Abstract

The present disclosure relates to a microelectromechanical device having a structure tiltable by piezoelectric actuation about two axes of rotation. For example, a microelectromechanical device includes: a stationary structure having a frame defining a cavity; a tiltable structure elastically suspended above the cavity and having a main extension in a horizontal plane; a piezoelectrically driven actuation structure that can be biased to cause the tiltable structure to perform a desired rotation about the first and second axes of rotation; and a support structure integrated with the fixed structure and extending from the frame into the cavity. The lever element is elastically coupled to the tiltable structure at a first end by an elastic suspension element and coupled to the support structure at a second end by an elastic connection element defining a lever axis of rotation. The lever elements are resiliently coupled to the actuation structure such that their bias causes a desired rotation of the tiltable structure about the first and second axes of rotation.

Description

[0001] priority statement [0002] This application claims priority from Italian Patent Application No. 102020000022978, filed September 29, 2020, the contents of which are hereby incorporated by reference in their entirety to the fullest extent permitted by law. technical field [0003] The present disclosure relates to a microelectromechanical device (manufactured using MEMS - microelectromechanical systems - technology) with a structure that can be tilted by piezoelectric actuation about two axes of rotation. Background technique [0004] Reference will be made below to a microelectromechanical mirror device in which a tiltable structure carries a reflective or mirror surface on its top surface, without loss of generality. [0005] In a known manner, microelectromechanical mirror devices, in particular of the vector scanner type (so-called MEMS vector scanners), are used in portable devices (e.g. smartphones or tablets) for projecting images at a distance, and in Used i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02G02B26/08
CPCG02B26/0858B81B3/0062B81B2201/042B81B2201/032B81B2203/0154B81B2203/0163
Inventor N·博尼R·卡尔米纳蒂M·默利
Owner STMICROELECTRONICS SRL