Method for processing small current data in integrated circuit test

Abstract

The invention provides a method for processing small current data in an integrated circuit test, which comprises the following steps of: acquiring a plurality of small current data of the existing test equipment, and fitting to obtain a function that the current changes along with time: y = a * ln (b * t + c) + d; acquiring small current data needing to be processed; fitting small current data needing to be processed to obtain a linear function y = e * t + f and a curvilinear function y = a1 * ln (b1 * t + c1) + d1 of current changing along with time; setting the reference current value of the new test equipment as yBL, and obtaining tBL according to a formula y = a * t + b; two intersection points exist between y = e * t + f and y = a1 * ln (b1 * t + c1) + d1, abscissa values are t1 and t2, the sizes of tBL, t1 and t2 are judged, and the time range of N times of testing is calculated; and averaging the N small current data in the N test time ranges to obtain standard small current data. Through the processing method of the small current data, when a client uses new test equipment, the small current data of the new test equipment can be compensated, and the small current data of existing equipment of the client can be matched.

Description

technical field [0001] The invention belongs to the technical field of integrated circuit device testing, and in particular relates to a processing method for small current data in integrated circuit testing. Background technique [0002] The integrated circuit test link is an important link to ensure that the integrated circuit meets the required performance and quality parameters. It is an indispensable part in the design, manufacturing and application of the entire integrated circuit product, and has become an integrated One of the key technologies for high reliability assurance of circuit products. [0003] At present, there are no relevant national standards, national standards, and industry standards for test equipment in the integrated circuit industry. Test equipment manufacturers use their own standards to calibrate and test equipment, which makes manufacturers and designers use different test equipment. There is a certain offset in the output data, and the user ca...

AI Technical Summary

Problems solved by technology

[0003] At present, there are no relevant national standards, national standards, and industry standards for test equipment in the integrated circuit industry. Test equipment manufacturers use their own standards to calibrate and test equipment, which makes manufacturers and designers use different test equipment. There is a certain offset in the output data. Users can only process and analyze the test data of the same device during use, and cannot process and analyze the test data of different test devices.

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