Device for generating deep ultraviolet laser

Abstract

The invention relates to a device for generating deep ultraviolet laser, and the device comprises a solid laser which provides continuous and stable laser; the focusing lens is used for focusing the laser emitted by the solid laser; the focusing lens is arranged on the outer side of the nitrogen chamber, and the nitrogen chamber is configured to provide a nitrogen environment; the nonlinear metasurface is arranged in the nitrogen chamber and has a third-order nonlinear optical property, and the laser focused by the focusing lens can generate third-harmonic deep ultraviolet laser through the nonlinear metasurface; the electric rotary table is arranged below the non-linear metasurface and used for finely adjusting the electric rotary table and providing a proper angle for the non-linear metasurface on the electric rotary table; and the light splitting assembly is configured to split the third harmonic deep ultraviolet laser from the nonlinear metasurface into long-wavelength fundamental frequency light and short-wavelength third harmonic deep ultraviolet laser.

Description

technical field [0001] The present disclosure relates to the technical field of ultraviolet lasers, and in particular, to a device for generating deep ultraviolet lasers. Background technique [0002] Due to its short wavelength and high single-photon energy, deep ultraviolet lasers with wavelengths less than 200 nm are widely used in many fields such as mechanical micromachining, microelectronics, ultraviolet spectroscopy, informatics, and medicine. Deep ultraviolet laser has great application potential in many fields due to its low thermal efficiency, strong and stable etching ability, and little transmission energy loss at room temperature. At present, the methods for generating deep ultraviolet lasers mainly include ArF excimer lasers and all-solid-state ultraviolet lasers. All-solid-state lasers have the advantages of compact structure and high efficiency. Using all-solid-state lasers combined with nonlinear optical crystals, using second-order nonlinear optical techno...

AI Technical Summary

Problems solved by technology

However, there are not many suitable deep-ultraviolet nonlinear optical crystals at present, and the technology is complex and bulky. In order to solve the shortcomings of high cost and complex structure of the current all-solid-state laser using second-order nonlinear multi-level frequency multiplication and sum frequency to obtain deep ultraviolet laser, There is an urgent need for a device for generating deep ultraviolet laser light with low cost and simple structure

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