Micromechanical gyroscope and electronic product

Abstract

The invention provides a micromechanical gyroscope and an electronic product, the micromechanical gyroscope comprises a first moving part, a second moving part, a plurality of driving parts and a detection part, the first moving part has a first center, the first moving part can swing around the first center along a first direction and a third direction along two ends of a second direction, the second moving part has a second center, and the driving parts can swing around the second center along the first direction and the third direction. The two ends, in the first direction, of the second moving part can swing around the second center in the second direction and the third direction, the multiple driving parts can drive the first moving part to swing in the first direction and drive the second moving part to swing in the second direction, and the detection part is located above or below the first moving part and the second moving part in the third direction. The detection part is used for detecting the moving distance of the first moving part and the second moving part in the third direction. According to the micromechanical gyroscope, the angular velocities in two directions can be measured at the same time through the first moving part and the second moving part, and differential detection is carried out to eliminate errors, so that the application scene of the micromechanical gyroscope is widened.

Description

technical field [0001] The invention relates to the technical field of gyroscopes, in particular to a micromachined gyroscope and electronic products. Background technique [0002] Micro-mechanical gyroscope is a typical angular velocity sensor, which generally includes a driving part, a moving part and a detecting part. When the angular velocity direction of the mechanical gyroscope is perpendicular to the above-mentioned plane, the moving part will be subjected to the Coriolis force perpendicular to the above-mentioned determined direction and will generate displacement. Measurement. In order to obtain accurate detection results, the existing micromachined gyroscope generally sets two moving parts with a phase difference of 180° to realize differential detection, but due to the limited size of the micromachined gyroscope, differential detection cannot be performed for all measurement directions. SUMMARY OF THE INVENTION [0003] The purpose of the present invention is ...

AI Technical Summary

Problems solved by technology

In order to achieve accurate detection results, the existing micro-mechanical gyroscope generally sets two moving parts with a phase difference of 180° to achieve differential detection. However, due to the limited volume of the micro-mechanical gyroscope, differential detection cannot be performed for all measurement directions.

Images