Rotary table calibration method and device, electronic equipment and storage medium
A calibration method and turntable technology, applied in the direction of measuring devices, instruments, etc., can solve the problems of increasing production energy consumption, large temperature difference between heating and cooling, and increasing costs, and achieve the effects of improving calibration efficiency, reducing time, and reducing energy consumption.
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[0036] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0037] See figure 1 , figure 1 is a flow chart of a turntable calibration method provided by an embodiment of the present invention, such as figure 1 As shown, the turntable calibration method includes the following steps:
[0038] 101. Obtain a temperature compensation curve corresponding to the to-be-calibrated chip by performing global temperature calibration on the to-be-calibrated chip on the turntable.
[0039] In the embodim...
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