Two-dimensional grating coupler and manufacturing method thereof
A two-dimensional grating, optical coupling technology, applied in the coupling of optical waveguides, instruments, light guides, etc., can solve the problems of large hardware resources and simulation time.
Pending Publication Date: 2022-07-29
TAIWAN SEMICON MFG CO LTD
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Problems solved by technology
To reduce the power loss and improve the coupling efficiency of conventional 2D grating couplers, complex 2D grating designs have been proposed to find the proper output field to match the given tapered design of 2D grating couplers, which consumes a lot of hardware resources and simulation time
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[0022] The following disclosure describes various exemplary embodiments for implementing various features of the subject matter. Specific examples of components and arrangements are described below to simplify the present disclosure. Of course, these components and arrangements are examples only and are not intended to be limiting. For example, it will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or one or more intervening elements may be present.
[0023] The waveguide surrounded by the cladding layer can confine light based on the refractive index contrast between the waveguide and the materials in the cladding layer. For example, silicon waveguides with submicron dimensions can confine infrared light (with wavelengths greater than about 700 nm or 700 nm) due to their strong refractive index contrast with the silicon oxide cladding, where the refractive in...
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Abstract
An apparatus and method for optical coupling are disclosed. In one example, a described apparatus includes: a planar layer; a grating region including an array of scattering elements arranged in the planar layer to form a two-dimensional grating; a first tapered structure formed in the planar layer to connect a first side of the grating region to the first waveguide, where the shape of the first tapered structure is a first triangle asymmetric to any line perpendicular to the first side of the grating region in the planar layer; and a second tapered structure formed in the planar layer to connect a second side of the grating region to the second waveguide, where the shape of the second tapered structure is a second triangle asymmetric to any line perpendicular to the second side of the grating region in the planar layer, where the first side and the second side are substantially perpendicular to each other.
Description
technical field [0001] Embodiments of the present invention relate to a two-dimensional grating coupler and a method of manufacturing the same. Background technique [0002] Optical gratings are commonly used to couple light between waveguides and optical fibers. Due to the extremely different dimensions of the waveguide and fiber, direct coupling will result in huge optical losses. Incident light coupled into a waveguide is usually in an unknown and arbitrary polarization state, thus requiring a two-dimensional (2D) grating coupler to provide transverse magnetic (TM) or transverse electric (TE) from the fiber Polarization mode polarized light into the waveguide. [0003] A conventional 2D grating coupler contains two symmetrical tapered structures coupled to the 2D grating. To reduce power loss and improve the coupling efficiency of conventional 2D grating couplers, complex 2D grating designs have been proposed to find the proper output field to match the given taper des...
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IPC IPC(8): G02B6/124G02B6/122G02B6/30
CPCG02B6/124G02B6/1228G02B6/305G02B6/34
Inventor 石志聪周淳朴斯帝芬鲁苏徐英杰卓联洲
Owner TAIWAN SEMICON MFG CO LTD