Distortion correcting method and device for plane body
A technology of deforming position and plane, which is applied to the structural parts of the record carrier, the casing/shield of the recording head, semiconductor/solid-state device manufacturing, etc.
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[0033] A preferred embodiment of the present invention will be described below with reference to the accompanying drawings.
[0034] figure 1 A deformation correction device for a planar body according to an embodiment of the present invention is schematically shown. as in figure 2 As shown in an enlarged manner in , as its main parts, this deformation correction device 2 includes a fixed point support device 3 for the substrate 1, a transfer device 4 for the substrate 1, a contact element 5 with a plurality of The measuring device 6, the straightening device 9 with the straightening pin 7 and the pressurizing pin 8 and a computing device (not shown). The device further includes a not-shown operation panel.
[0035]The fixed point support device 3 for the substrate 1 adopts, for example, a plate clamp, a clamping device provided on the platen of the deformation correction device 2, etc., and the support device supports the fixed point of the substrate 1 so that the postur...
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