Liquid crystal display manufactured from thin film transistors as well as manufacturing method
A liquid crystal display and thin film transistor technology, which is applied in the direction of transistor, semiconductor/solid-state device manufacturing, instruments, etc., can solve the problems of low output and high cost, and achieve the effect of reducing manufacturing time, reducing cost, and increasing output
Inactive Publication Date: 2006-10-18
AU OPTRONICS CORP
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Problems solved by technology
[0011] However, since the traditional TFT requires two contact window manufacturing processes, the existing TFT manufacturing process requires as many as six masks and multiple photolithography processes, resulting in problems such as low yield and high cost.
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[0020] First, please refer to image 3 , shows a top view of a pixel layout of a thin film transistor liquid crystal display structure according to an embodiment of the present invention. The thin film transistor liquid crystal display structure includes a transparent substrate 100; gate region 310; doped silicon layer 320; source / drain region 330; contact region 340; indium tin oxide layer 350; black matrix on the color filter region 360 ; capacitor line 370 and gate line 380 .
[0021] Figure 4A to Figure 4E shows the basis of image 3 The cross-sectional diagrams of the production process of the AA' section of , these process cross-sectional diagrams mainly show the capacitor part of the thin film transistor liquid crystal display. First, if Figure 4A As shown, a first metal layer, such as a molybdenum / aluminum-neodymium alloy layer, is deposited on a transparent substrate 100 , and then the first metal layer is defined by a first photoetching process to form a first ...
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The invention relates to a thin film transistor liquid crystal display and a manufacturing method thereof. The manufacturing method can reduce the number of photomasks produced by an array, and comprises the following steps: depositing a first metal layer on a transparent substrate, and defining the first metal layer to form the gate electrode and the first capacitor electrode; form a gate insulating layer on the surface of the gate electrode and the first capacitor electrode; form a semiconductor layer on the gate insulating layer, and define the semiconductor layer to form a predetermined shape; depositing a second metal layer on the above-mentioned transparent substrate, and defining the second metal layer to form a source / drain metal layer and a second capacitor electrode; depositing an insulating layer on the above-mentioned transparent substrate; defining the insulating layer, the second capacitor electrode and the gate insulating layer to form a contact window, and the contact window is located between two adjacent capacitor electrodes of the first capacitor electrode; depositing a transparent conductive layer on the transparent substrate; and A black matrix area is formed on the corresponding area above the contact window.
Description
technical field [0001] The invention relates to a thin film transistor liquid crystal display and a manufacturing method thereof, in particular to a manufacturing method capable of reducing the number of array mask layers of the thin film transistor liquid crystal display. Background technique [0002] Liquid crystal display (hereinafter referred to as LCD) is the most widely used flat-panel display at present. It has the characteristics of low power consumption, thin and light weight, and low-voltage drive. It can be applied in personal computers, word processors, navigation, etc. Systems, game devices, projectors, viewfinders, and portable devices in daily life, such as: watches, electronic computers, televisions, etc. display aspects. [0003] The display principle of liquid crystal display is to use the dielectric anisotropy and conductive anisotropy of liquid crystal molecules. When an electric field is applied, the arrangement state of liquid crystal molecules will be ...
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IPC IPC(8): G02F1/1362H01L29/786G02F1/136G09F9/35H01L21/3205
Inventor 陈茂松
Owner AU OPTRONICS CORP