Placode processor and liquid feeder

Abstract

Provided are an apparatus for transferring the resist solution, which do not generate particles and transfer the resist solution with high precision. A resist pump and a driving equipment are installed to a transferring equipment which transfers a resist solution to a slit nozzle. A first bellows having a smaller diameter, a second bellows having a larger diameter, a coupling member for the first and second bellows and a tube as a flow passage of the resist solution are installed to the resist pump. By allowing the moving member to be moved downward by the driving equipment, the inner volume of the tube is decreased, thereby the resist solution at the inner tube being transferred to the slit nozzle. By allowing the coupling member to be moved downward by the driving equipment, the inner volume of the tube is increased, thereby the resist solution is absorbed in the resist pump.

Description

technical field [0001] The present invention relates to a technique for feeding a treatment liquid coated on a substrate. Background technique [0002] When coating a processing liquid such as a resist liquid on a substrate, it is known to use various pumps such as a syringe pump (piston pump), a bellows pump (bellows pump), a gear pump, or a diaphragm pump to spray the resist liquid The feeding device and the pressure-feeding device that feeds the resist solution with a certain pressure, etc. [0003] In particular, in a slit coater that applies a resist solution through a slit nozzle, the film of the resist solution coated on the substrate is determined by the moving speed of the slit nozzle and the amount of resist solution supplied. thick. Therefore, in order to control the film thickness of the resist liquid with high precision, bellows pumps or piston pumps have been used conventionally. [0004] However, since the structure of the bellows pump unavoidably tends to ...

AI Technical Summary

Problems solved by technology

There is a question of when the pump needs to be maintained

[0013] In addition, since the driving mechanism (motor 131, screw 132, and nut member 133) that moves the piston 112 has low machining accuracy and control accuracy, the feeding accuracy of the nut member 133 (piston 112) is low. question

[0014] Furthermore, due to the driving of the piston valve 110, the sealing member 113 is worn by friction with the cylinder body 111, and there is a problem that the resulting particles are mixed in the treatment liquid or the sealing member 113 must be replaced periodically.

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