Convex/concave pattern-forming stamp, convex/concave pattern-forming method and magnetic recording medium

Abstract

A convex/concave pattern-forming stamp which is capable of making recesses of a convex/concave pattern uniform in depth and preventing deformation and peeling of portions of the convex/concave pattern at the same time. The stamp has on a surface thereof an annular area formed with protrusions for forming a convex/concave pattern in a resin layer on a surface of a disk-shaped substrate by being pressed against the resin layer. Protrusions for dispersing a pressure applied to the resin layer when the stamp is pressed against the resin layer are formed in at least one of an outer area located radially outward of the annular area and an inner area located radially inward of the annular area.

Description

technical field [0001] The present invention relates to a stamper for forming a concave-convex pattern that forms convex portions for forming a concave-convex pattern on a resin layer by pressing a predetermined annular region on the surface of a resin layer on the surface of a substrate, and an imprint mold for forming a concave-convex pattern using the stamper for forming a concave-convex pattern A concavo-convex pattern forming method for forming a concavo-convex pattern, and a magnetic recording medium in which data recording tracks are formed using the concavo-convex pattern formed by the concavo-convex pattern forming method. Background technique [0002] For example, in the process of manufacturing semiconductor elements or recording media, as a method of forming fine (nano-scale) concave-convex patterns on the resin layer on the surface of the base material, it has been proposed to form nano-scale concave-convex patterns on the imprint mold (mold). The imprint method...

AI Technical Summary

Problems solved by technology

Therefore, if Figure 20 As shown, the concave-convex pattern forming region 104 in the outer peripheral portion 104b and the inner peripheral portion 104c is formed with a depth of concave portion (the height of the convex portion) that is deeper than the concave portion depth formed in the central portion 104a of the concave-convex pattern forming region 104 (than the height of the convex portion). The height is high), finally, there is a problem that the depth of each concave part is not uniform

Because the pressure is concentrated on the outer peripheral portion 104b and the inner peripheral portion 104c of the concave-convex pattern forming area 104, there are two problems as follows: one is that the concave-convex patterns of the outer peripheral portion 104b and the inner peripheral portion 104c are deformed, and the other is that the resin layer When the stamper 41 is released from the stamper 103, the concave-convex pattern (resin material) of the outer peripheral portion 104b and the inner peripheral portion 104c adheres to the convex portion 51 of the stamper 41 and peels off.

Therefore, there is a problem in the magnetic recording medium 91 manufactured with this concave-convex stamper that the height of the separation track 92 (the depth of the groove that separates the separation track 92) is not uniform, or there is a gap outside the track forming region 102. Deformation or defect generated on the separation track 92 of the peripheral portion and the inner peripheral portion, thereby causing a recording error when recording data

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