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Chemical agent supplier

A technology of chemical preparations and supply devices, which is applied in chemical instruments and methods, semiconductor/solid-state device manufacturing, crystal growth, etc., and can solve problems such as chemical preparations that cannot be recycled and reused

Inactive Publication Date: 2007-04-04
SEMES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, conventional chemical supply devices cannot recycle and reuse used chemicals in processing units

Method used

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Embodiment Construction

[0024] Hereinafter, the chemical agent supply device according to the present invention will be described more fully with reference to the accompanying drawings.

[0025] Referring to FIG. 2, the chemical supply device 100 includes a mixing tank 110, a circulation device, a storage tank 120, a heating unit 130, and a chemical recycling device.

[0026] The mixing tank 110 receives chemicals from supply pipes 202a, 204a, and 206a, which are connected to the first, second, and third supply tanks 202, 204, and 206, respectively. The chemicals supplied to the mixing tank 110 are circulated and mixed through the circulation pipe 114 . A circulation pump 116 for forced circulation of chemicals is installed on the circulation pipe 114 as a matter of course. The mixing tank 110 includes a mixer 150 for effectively mixing chemicals, which will be described below with reference to FIG. 3 .

[0027] Referring to FIG. 3 , the mixer 150 has an outer pipe 152 including chemical inlets 152...

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PUM

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Abstract

The present invention is directed to a chemical supply apparatus including a first tank in which at least two chemicals supplied from each supply bath are mixed, circulating means for circulating the chemicals in the first tank to uniformly mix the chemicals therein, a second tank for storing the mixed solution provided from the first tank, a distributor for distributing the mixed solution to supply the mixed solution to each processing unit, and a heating unit mounted upon a supply line for supplying the mixed solution to the distributor to heat up the mixed solution.

Description

technical field [0001] The present invention relates to a semiconductor manufacturing device, and more particularly to a chemical supply device which continuously supplies diluted and mixed chemical to a chemical processing unit. Background technique [0002] In recent years, various types of chemical agent supply devices have been widely used in the production of semiconductor devices. The chemical supply device may supply a chemical prepared by diluting a stock liquid with purified water or mixing it as a plurality of stock liquids to a processing unit for manufacturing a semiconductor device. [0003] If the chemical agent supplied to the processing unit is unstable due to changes in its internal composition, aggregation of finely separated particles, etc., the semiconductor device may be defective. Therefore, a chemical agent supply device is required to provide a stable chemical agent. [0004] A conventional chemical supply apparatus for supplying a cleaning solution...

Claims

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Application Information

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IPC IPC(8): C23F1/08H01L21/306H01L21/465B01F15/04H01L21/00H01L21/302H01L21/304H01L21/68
CPCH01L21/67086H01L21/68Y10T117/1016H01L21/302
Inventor 裵正龙安斗根
Owner SEMES CO LTD