Composite organic-inorganic material and its production process
An inorganic composite material and organic technology, which is applied in the field of manufacturing organic-inorganic composite materials and organic-inorganic composite materials, can solve the problems such as the inability to fully improve the adhesion between the light transmission layer and the substrate, and achieve the effect of excellent light transparency
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Embodiment 1
[0112] The above coating solutions 5, 4, 3, 2 and 1 were applied to the quartz glass substrate in the order shown to form a laminated material in which five layers of thin films composed of each organic-inorganic composite material were laminated. Each coating solution was applied by spin coating. The thickness of each layer after drying is intended to be 2 microns. The thickness of each layer is controlled by the rotation speed of the substrate in the spin coating step. Each coating solution was applied and then dried in an electric oven at about 110° C. for 1 hour. Since 5 layers of film were laminated, the sample was dried 5 times in the electric oven in total.
[0113] Fig. 4 is a graph showing changes in Si element concentration in the laminated material formed as described above. Si element concentration was determined by secondary ion mass spectrometry (SIMS). In FIG. 4, the distance from the surface of the substrate is shown on the abscissa. FIG. 4 confirms that i...
Embodiment 2
[0116] In the same manner as in Example 1, coating solutions 5, 4, 3, 2 and 1 were applied in the order shown on a quartz glass substrate (refractive index: 1.46) to form a laminated material. However, in Example 2, the respective layers were formed with a thickness of 20, 10, 5, 3 and 22 micrometers, respectively.
[0117] Fig. 5 shows the variation curve of the refractive index of the laminated material of Example 2 according to the thickness direction.
[0118] As shown in FIG. 5, this laminate has a gradient profile in which the refractive index gradually decreases from the substrate to the surface of the laminate.
[0119] As shown in Fig. 6, this laminated material can be used as a gradient index type planar optical waveguide. Referring to FIG. 6 , the laminated material 4 is placed on a quartz glass substrate 3 . The laser light 5 enters the end surface of the layer having a lower refractive index close to the base material 3 in the laminated material 4 . Near the en...
Embodiment 3
[0124] Coating solutions 5, 4, 3, 2, 1, 2, 3, 4 and 5 were applied in the order shown on the quartz glass substrate on which these thin films were laminated.
[0125] Each coating solution was applied and dried in the same manner as in Example 1. The thickness of each layer after drying is predetermined to be 2 microns. The stacked 9 films form a total of one stack.
[0126] Fig. 9 is a variation curve of the concentration of Si element in the thickness direction of the laminated material, and the concentration is measured by SIMS. As shown in FIG. 9 , in the middle of the laminated material, the concentration of Si element is the highest, and the concentration of the element first increases and then decreases in the thickness direction of the laminated material. Therefore, the refractive index first decreases and then increases.
[0127] As shown in Figure 9, regions with a thickness of about 1 micron are formed at positions 1, 3, 5, 7, 9, 11, 13, 15 and 17 microns away fr...
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Abstract
Description
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