Composite organic-inorganic material and its production process
An inorganic composite material and an organic technology, which is applied in the field of manufacturing organic-inorganic composite materials and organic-inorganic composite materials, can solve the problem of not being able to fully improve the adhesion between a light transmission layer and a substrate, and achieve the effect of excellent light transparency
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Embodiment 1
[0104] The above coating solutions 5, 4, 3, 2 and 1 were applied to the quartz glass substrate in the order shown to form a laminated material in which five layers of thin films composed of each organic-inorganic composite material were laminated. Each coating solution was applied by spin coating. The thickness of each layer after drying is intended to be 2 microns. The thickness of each layer is controlled by the rotation speed of the substrate in the spin coating step. Each coating solution was applied and then dried in an electric oven at about 110° C. for 1 hour. Since 5 layers of film were laminated, the sample was dried 5 times in the electric oven in total.
[0105] Figure 4 is a curve of Si element concentration change in the laminated material formed as described above. Si element concentration was determined by secondary ion mass spectrometry (SIMS). Figure 4 In , the distance from the substrate surface is shown on the abscissa. Figure 4 It was confirmed tha...
Embodiment 2
[0108] In the same manner as in Example 1, coating solutions 5, 4, 3, 2 and 1 were applied in the order shown on a quartz glass substrate (refractive index: 1.46) to form a laminated material. However, in Example 2, the respective layers were formed with a thickness of 20, 10, 5, 3 and 22 micrometers, respectively.
[0109] Figure 5 Shown is the variation curve of the refractive index of the laminated material of Example 2 in the thickness direction.
[0110] Such as Figure 5 As shown, the laminate has a gradient profile with a gradually decreasing refractive index from the substrate to the surface of the laminate.
[0111] Such as Figure 6 As shown, this laminated material can be used as a gradient index type planar optical waveguide. try Figure 6 , the laminated material 4 is placed on the quartz glass substrate 3 . The laser light 5 enters the end surface of the layer having a lower refractive index close to the base material 3 in the laminated material 4 . Near ...
Embodiment 3
[0116] Coating solutions 5, 4, 3, 2, 1, 2, 3, 4 and 5 were applied in the order shown on the quartz glass substrate on which these thin films were laminated.
[0117] Each coating solution was applied and dried in the same manner as in Example 1. The thickness of each layer after drying is predetermined to be 2 microns. The stacked 9 films form a total of one stack.
[0118] Figure 9 is the change curve of Si element concentration in the thickness direction of the laminated material, and the concentration is measured by SIMS. Such as Figure 9 As shown, in the middle of the laminated material, the concentration of Si element is the highest, and the concentration of the element first increases and then decreases in the thickness direction of the laminated material. Therefore, the refractive index first decreases and then increases.
[0119] Such as Figure 9 As shown, regions of about 1 micron in thickness are formed at positions 1, 3, 5, 7, 9, 11, 13, 15 and 17 microns ...
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Abstract
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