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Manufacturing method of electronic source substrate

A manufacturing method and electron source technology, which are applied in the manufacture of discharge tubes/lamps, electrode systems, cold cathodes, etc., can solve problems such as the deterioration of substrate accuracy.

Inactive Publication Date: 2007-07-18
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] However, as the size of the substrate increases, so does the size of the area where the droplets are applied, making it extremely difficult to maintain the overall positional accuracy of electrodes (or their substitutes) across the substrate at the same level as for small-sized substrates ( distortion), in addition, the accuracy along the thickness direction of the substrate also deteriorates

Method used

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  • Manufacturing method of electronic source substrate
  • Manufacturing method of electronic source substrate
  • Manufacturing method of electronic source substrate

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Embodiment Construction

[0034] Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

[0035] FIG. 3 is a schematic diagram for illustrating an example of a method of manufacturing an electron-emitting element in a method of manufacturing an electron source substrate of the present invention. Fig. 4 is a schematic view showing an example of a surface conduction type electron emission element manufactured by the manufacturing method of the present invention, (a) being a plan view, and (b) being a cross-sectional view.

[0036] In FIGS. 3 and 4, 11 is a substrate, 12 and 13 are element electrodes, 14 is a conductive thin film, 15 is an electron emission part, 31 is a droplet discharge head, and 32 is a droplet.

[0037] Next, the method of manufacturing an electron emission device including the steps before and after the present invention will be described in order.

[0038] First, in the preceding process of the present invention, element ...

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Abstract

A fabrication method for an electron source substrate comprises: a measurement step wherein at least one of a substrate, having a plurality of pairs of electrodes on the surface thereof, and measurement means for measuring the position of the substrate in at least one direction of the mutually orthogonal XYZ directions, is scanned relatively in one direction, thereby measuring the substrate position; a control step for controlling the discharge position of droplets containing electroconductive thin-film material onto the substrate from an ink-jet head, based on the measurement results; and a discharge step for discharging the droplets between the pairs of electrodes while relatively scanning at least one of the ink-jet head and substrate in one direction; wherein the scanning direction in the measurement step and the scanning direction in the discharge step are generally parallel; and wherein the measurement step and the discharge step are performed in a single scan.

Description

technical field [0001] The present invention relates to a manufacturing method and manufacturing device of an electron source substrate. The electron source substrate is constituted by arranging a plurality of electron emission elements, and each electron emission element includes a pair of element electrodes and a conductive electrode connecting the element electrodes. conductive thin film, and an electron emission portion is formed on a part of the above conductive thin film. Background technique [0002] In recent years, FPDs and PDPs have become more and more popular as display elements such as large displays and large TVs in airport lounges, etc., and they tend to become larger as technology advances. An electron source substrate, which is one type of FPD display element, is also tending to be larger in size. [0003] The electron source substrate is a substrate for display constituted by arranging a plurality of electron emission elements, each electron emission eleme...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J9/02
CPCH01J2201/3165H01J9/022
Inventor 堀越康夫大塚博之
Owner CANON KK