Pump device and method for generating adjustable constant fluid volume flow and its application

Abstract

The invention provides a method and a pump apparatus provided for the generation of an adjustable, substantially constant volume flow of a fluid by means of a pump apparatus, wherein the fluid (5) is forwarded by the pump apparatus (1) from a reservoir (2) into a flow connection (4). A rotary pump (1) is used as the pump apparatus and the rotary pump (1) is operated at an efficiency which is less than half the maximum efficiency (eta max) of the rotary pump (1).

Description

technical field [0001] The invention relates to a method and a pump device for producing an adjustable and substantially constant volumetric flow of a fluid as described in the preambles of the independent claims of the corresponding class, and to the use of this method. Background technique [0002] In many industrial processes and a large number of process operations it is necessary to deliver fluids in a metered manner, ie a fluid with an approximately constant volume flow should be delivered in such a way that the quantity of fluid delivered per unit of time is constant. An example that may be given here is the chemical mechanical polishing (CMP) process as applied in the semiconductor industry. In such a process, a suspension, usually called a slurry, generally composed of very fine solid particles and a liquid, is applied to a rotating wafer where it is used to polish or grind very fine semiconductor structures. In this respect, it is necessary to apply the suspension...

AI Technical Summary

Problems solved by technology

For example, leakage due to the presence of wear particles, such as along the piston of a piston pump, when piston rings and / or barrel walls are damaged

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