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Magnetic suspension rotor azimuth microgyro

A magnetic levitation rotor and micro-gyro technology, applied in the field of micro-electromechanical, can solve problems such as inability to angular velocity, limiting the use of azimuth gyroscopes, etc.

Inactive Publication Date: 2004-02-25
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As an angular velocity sensor, the gyroscope needs to detect the angular velocity in the vertical direction in addition to the angular velocity in the horizontal direction. However, the horizontal suspension structure can only be placed horizontally, and it cannot be used to detect the angular velocity in the vertical direction, which limits its application on the azimuth gyro. use

Method used

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  • Magnetic suspension rotor azimuth microgyro
  • Magnetic suspension rotor azimuth microgyro
  • Magnetic suspension rotor azimuth microgyro

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Embodiment Construction

[0018] like figure 1 , figure 2 , image 3 and Figure 4 As shown, the present invention includes: a right base 1, stator coils and sensing electrodes 2, 4, 8, 10, 11, 13, 15, 17 on both sides, a magnetic substrate 6, 14, a left base 18, and an anti-bonding post 3, 9, 12, 16, the rotor support column 5 and the micro-rotor 7 are connected in the following way: the stator coil and sensing electrodes 2, 4, 8, 10, 11, 13, 15, 17 and the micro-rotor are sealed on the left In the cavity formed by the base body 18 and the right base body 1, magnetic substrates 6 and 14 are deposited on the left base body 18 and the right base body 1, and stator coils and sensing electrodes are electroplated on the magnetic substrates, and anti-sticking columns 3, 9, 12, 16 and the rotor support column 5, the micro-rotor 7 is arranged on the rotor support column 5 through the small hole in its center.

[0019] The stators on the left base body 18 and the right base body 1 are provided with four-p...

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Abstract

The magnetic suspension rotor azimuth microgyro belongs to the field of micro-electro-mechanical technology, and includes right base body, two-side stator coils and sensing electrodes, magnetic substrate, left base body, anti-cohesive column, rotor supporting column and microrotor. The stator coils, sensing electrodes and microrotor are sealed in the cavity formed from left base body and right base body, the magnetic substrates are deposited on the left base body and right base body, on the magnetic substrate the stator coil and sensing electrode are electroplated, and the anti-cohesive column and rotor supporting column are deposited, and the microrotor can be set on the rotor-supporting column by means of its central small hole. Said invention is a magnetic suspension system.

Description

technical field [0001] The invention relates to a suspension type azimuth micro-gyroscope, in particular to a magnetic suspension rotor azimuth micro-gyroscope, which belongs to the field of micro-electromechanical technology. Background technique [0002] In the past two decades, many kinds of micro-vibration gyroscopes have been processed by using silicon surface micro-processing technology or bulk micro-processing technology at home and abroad, but it is difficult for micro-vibration gyroscopes to achieve the high precision of traditional gyroscopes due to various reasons. In the 1990s, Shearwood and others proposed a magnetic levitation rotor micro-gyroscope. The magnetic levitation rotor micro-gyroscope is composed of planar coils, induction electrodes and micro-rotors. The planar coils are divided into levitation coils, rotating There are three types of coils and stabilizing coils. The magnetic levitation rotor micro-gyroscope is suspended and rotated by the principle...

Claims

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Application Information

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IPC IPC(8): G01C19/24H02K17/16H02N15/00
Inventor 陈文元吴校生赵小林张卫平
Owner SHANGHAI JIAO TONG UNIV
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