Manufacturing method of electronic transmitting element, electronic source and image forming device using carbon fibre, ink made of carbon fibre
A technology of electron emission and manufacturing method, which is applied in the manufacture of discharge tubes/lamps, electrical components, electrode systems, etc., and can solve problems such as not being able to fully utilize carbon fibers
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Embodiment 1
[0127] Alloy particles having a composition of Pd (60 atm%) and Co (40 atm%) and an average particle diameter of 5 nm were prepared, and a dispersion liquid in which the alloy particles were dispersed at 0.1 g / L was prepared. In the above-mentioned dispersion liquid, ethanol was used as a dispersion medium, and 5 wt% of PVP (polyvinylpyrrolidone) was added as an anti-aggregation agent in order to disperse the above-mentioned alloy particles as a monomer.
[0128] Hereinafter, using the above-mentioned dispersion liquid, it will be described in detail Figures 2A to 2E-2 The manufacturing process of the electron-emitting element of this embodiment is shown in .
[0129] (Process 1)
[0130] A quartz substrate is used as the substrate 201. After sufficient cleaning, in order to form the lead-out electrode 202 and the cathode (emitter) electrode 203, first, the entire surface of the substrate 201 is sequentially and continuously vapor-deposited by the sputtering method (not show...
Embodiment 2
[0145] A dispersion liquid in which alloy particles having a composition of Pd (60 atm%) and Co (40 atm%) and an average particle diameter of 8 nm were dispersed at 0.1 g / L was used. Using pure water as a dispersion medium without using the anti-aggregation agent used in Example 1, a dispersion liquid in which alloy fine particles consist of several to several tens of aggregates was prepared.
[0146] In this example, an electron emission element was fabricated in the same manner as in Example 1 except that Step 2 in Example 1 was performed as follows.
[0147] (Process 2)
[0148] The peeling metal Cr204 for the upper layer after peeling is patterned ( Figure 2B ).
[0149] Next, a TiN layer was formed as a conductive material layer 205 in which carbon fibers 207 were grown via alloy particles 206 .
[0150] The above-mentioned dispersion of alloy fine particles 206 was spin-coated thereon using a spinner at 3000 rpm. After coating, an oxidation step was performed at 350...
Embodiment 3
[0155] A dispersion liquid in which alloy particles having a composition of Pd (70 atm%) and Co (30 atm%) and an average particle diameter of 10 nm were dispersed at 0.1 g / L was prepared. Use isopropanol as the dispersion medium. In addition, in this example, 10 wt% of PVA (polyvinyl alcohol) was added to the dispersion as an anti-aggregation agent in order to disperse the alloy particles as a monomer.
[0156] In this example, an electron emission element was fabricated in the same manner as in Example 1 except that Step 2 in Example 1 was performed as follows.
[0157] (Process 2)
[0158] The peeling metal Cr204 for the upper layer after peeling is patterned ( Figure 2B ).
[0159] Next, a TiN layer was formed as the conductive material layer 205 .
[0160] The above-mentioned dispersion liquid of alloy particles 206 was applied thereon from above the substrate 201 using a spinner. After coating, the removal of the dispersion medium and the anti-aggregation agent and ...
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