Conductive pattern check-up apparatus

A conductive pattern and inspection device technology, which is applied in measurement devices, electrical measurement, and electrical variable measurement, etc., can solve the problems of being easily affected by noise, unreliable inspection, and small voltage value of conductive patterns, and achieves the effect of simple inspection.

Active Publication Date: 2005-02-09
UNION ARROW TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the voltage value induced on the conductive pattern is very small and is

Method used

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  • Conductive pattern check-up apparatus

Examples

Experimental program
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Effect test

Embodiment 2

[0050] Next, a case where a common bar is used as a feeding electrode will be described.

[0051] Usually, in the conductive pattern 14 , in order to prevent damage to the conductive pattern due to static electricity, one end of all the conductive patterns is connected by a conductive sheet called a common bar. In the case of such a glass substrate, the common bar can also be used as a feeding electrode.

[0052] Specifically, as shown in FIG. 5 , an AC signal is applied to the conductive pattern 14 via the sensor electrode 18 and the common strip 30 . In this case, for feeding power to the common bar 30 , for example, a single-contact contact probe or the like may be used. Since the common bar 30 is physically and electrically connected to one end of all the patterns, it has the same function as the above-mentioned feeding electrode.

[0053] Therefore, when the sensor electrode 18 is moved in the Y direction, the current value detected by the current detector 22 is as show...

Embodiment 3

[0056] Next, other embodiments will be described.

[0057] Image 6 It is a schematic plan view of a pattern inspection device 10 as another example. In this pattern inspection device 10, a pair of first electrodes 32 provided at both ends of the pattern and a pair of second electrodes 34 provided on both sides of the pattern to be inspected are used as feeding electrodes. In addition, defect inspection is performed based on the voltage value of the sensor electrode 36 provided on the inspection target pattern.

[0058] The pair of first electrodes 32 are conductive sheets positioned above both ends of the conductive pattern 14 during inspection, and function as feeding electrodes for disconnection inspection. The first electrode 32 has a width covering the ends of all the patterns, and is electrostatically coupled to the ends of all the conductive patterns 14 . However, as long as the first electrode 32 has a width covering three or more pattern ends including the inspecti...

Embodiment 4

[0082] Next, a pattern inspection device 10 as another example will be described.

[0083] This pattern inspection device 10 is used especially for inspection of gate patterns and Cs patterns arranged on glass substrates used in liquid crystal display panels.

[0084] In the manufacturing process of the liquid crystal display panel, firstly, the gate pattern and the Cs pattern are arranged on the glass substrate 12 at the same time. The gate pattern is a plurality of conductive patterns arranged in columns on the glass substrate. The Cs pattern is a conductive pattern alternately arranged in a column. Since the distance between the gate pattern and the Cs pattern is extremely small (for example, several tens of um), a short circuit is easily generated. The pattern inspection apparatus 10 especially suitable for this short-circuit inspection is demonstrated.

[0085] FIG. 9 shows a schematic plan view of the pattern inspection device 10 .

[0086] The gate pattern 50 and th...

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PUM

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Abstract

To perform status inspection of a conductive pattern simply and reliably. The electric conduction pattern inspection device 10 comprises a sensor electrode 18 connected with an electrostatic coupling to one end of an inspection object pattern 14; an electricity supply electrode 16 connected with the electrostatic coupled to the other ends of all conductive patterns 14. AC signal is applied to the inspection object pattern via the electric supply electrode 16 and the sensor electrode 18, then a current value which flows between a power source 20 and the sensor electrode 18 is detected. Based on the current value detected, existence of disconnection or short circuiting of the conductive pattern is detected.

Description

technical field [0001] The present invention relates to a conductive pattern inspection device that inspects the state of a conductive pattern formed on a substrate. Background technique [0002] As a method of inspecting the state of a conductive pattern formed on a substrate, a method of bringing pin probes into contact with both ends of the conductive pattern is known in the art. It passes current through one contact probe and detects a voltage value through the other contact probe. And, by obtaining the resistance value of the conductive pattern from the detected value, disconnection (disconnection) and short circuit (short) of the conductive pattern are detected. [0003] However, in this method, there are problems in that the conductive pattern is damaged by the contact of the contact probe and the contact probe must be replaced according to the pitch of the conductive pattern. [0004] Therefore, Japanese Patent Application Laid-Open No. 2002-365325 discloses a circ...

Claims

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Application Information

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IPC IPC(8): G01R31/02G01R31/00H01L21/66
CPCG01R19/165G01R31/2812G01R31/50
Inventor 小原徹板垣卓男藤井昌幸
Owner UNION ARROW TECH
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