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A device and method for communicating data in a process control system

A process control system and control system technology, applied in the field of process control systems

Inactive Publication Date: 2005-02-09
BROOKS AUTOMATION INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] Additionally, adding high-speed data collection to process tools has traditionally been a complex and destructive process because of the limitations of industry communication standard protocols SECS, SECS II, and GEM
In addition, most engineering data collection systems use multiple communication modules, which face many technical challenges
Additionally, the use of proprietary communication formats for communicating between manufacturing tools and process controllers limits software options for advanced process control users

Method used

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  • A device and method for communicating data in a process control system
  • A device and method for communicating data in a process control system
  • A device and method for communicating data in a process control system

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Embodiment Construction

[0026] Referring to Figure 1, there is shown a block diagram of a system 10 incorporating features of the present invention. Although the invention has been described with reference to the embodiments shown in the drawings, it should be understood that the invention can be embodied in many different forms.

[0027] As shown in FIG. 1, one embodiment of a system 10 in which the present invention may be used generally includes a process control system adapted to control a manufacturing process by providing computerized control of a manufacturing tool 12. System 10 generally includes a communications compiler system 30 for communicating process data and device control instructions between device interface system 14 and process data control system 20 . In another embodiment, the system 10 may include other suitable elements for enabling the device interface device to communicate with the process control system. A feature of the present invention is the provision of a connection a...

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PUM

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Abstract

A method for communicating process data between a plurality of devices (12) in a process control system (20), including receiving process data in an equipment interface system data format from an equipment interface system (14), and selecting a set of the process data received from the equipment interface system (14) for communication to a process data control system (20). The method also includes configuring the selected set of process data from the equipment interface system data format into an open format for communication to the process data control system (20), and transmitting the configured process data to the process data control system (20).

Description

[0001] Cross References to Related Applications [0002] This application claims priority to US Provisional Patent Application Serial No. 60 / 336,129, filed October 31,2002. technical field [0003] The present invention relates to a process control system, and more particularly to a system and method for communicating between a process control system and semiconductor fabrication and manufacturing tools. Background technique [0004] Traditionally, methods of collecting process data from manufacturing tools have involved breaking signal lines between the tool and the tool controller such as the device interface program by multiplexing the industry standard SECS data interface between the tool controller and the tool . Such multiplexing and demultiplexing can affect the quality of processed data and interfere with communications between the tool and the tool controller. [0005] While this tapping method is used to some extent in the manufacture of standard 200mm wafers, fa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B15/02
CPCG05B2219/25204G05B15/02G05B2219/31181
Inventor 艾邵克·R.·特里帕斯姆塔库玛·拉玛铃甘戴维·鲁克斯塔利斯
Owner BROOKS AUTOMATION INC