Near field optic microscope

A near-field optical and microscope technology, applied in microscopes, optics, optical components, etc., can solve the problems of non-adjustable resolution, difficult positioning and convergence, and achieve the effect of high light transmittance and resolution, and simple manufacturing process.

Inactive Publication Date: 2005-03-02
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

However, the above technology has the following disadvantages: (1) the small hole is pasted after production, and it is very difficult to make the small hole, position the small hole on the optical axis of SIL, etc., and converge the light to the small hole; (2) The size of the small hole is fixed. When the size of the small hole is required to become larger, only the entire SIL can be replaced, and the resolution cannot be adjusted.

Method used

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Embodiment Construction

[0014] see first figure 1 , figure 1 Schematic diagram of the structure of the near-field optical microscope of the present invention. The near-field optical microscope of the present invention comprises a laser beam 1, and its composition is: on this laser beam 1 advancing direction and become 45 ° with this laser beam 1, put half anti-half lens 2, in perpendicular to this laser beam 1 and pass through the optical axis of the half-mirror 2, a detector 3 is placed coaxially above the half-mirror 2, and a converging lens 4, a hemispherical solid immersion lens 4, and a hemispherical solid immersion Lens 5, sample 6 and sample holder 7, the super-resolution mask layer 11 that the lower surface of this hemispherical solid immersion lens 5 is coated with, and this super-resolution mask layer 11 is positioned at the focal plane of converging lens 4, described sample 6 is located on the sample holder 7.

[0015] The super-resolution mask layer 11 is antimony (Sb), silver oxide (A...

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Abstract

The invention is a near field optical microscope which includes a laser beam, its character lies in: its structure is: semi-reflect and semitransparent mirror is arranged on the advancing direction of the laser beam and form an angle of 45 degrees to the laser beam, on the light shaft vertical to the laser beam and penetrating the semi-reflection and semitransparent mirror, a detector is arranged above the semi-reflection and semitransparent mirror coaxially, a gathering lens, semi-sphere solid immersing lens, sample and sample frame are arranged under the semi-reflection and semitransparent mirror, the lower surface of the solid immersing lens are plated with a layer of mask layer and the super-resolution mask layer is on the focus plane of the gathering lens, the sample is on the sample frame. The resolution of the microscope is higher and it is adjustable.

Description

technical field [0001] The invention relates to a near-field optical microscope, in particular to a near-field optical microscope that uses a super-resolution mask material and a solid immersion lens (Solid Immersion Lens, abbreviated and abbreviated as SIL) as converging light. Background technique [0002] Compared with the near-field optical microscope using the fiber optic probe as the converging light, the near-field optical microscope using the SIL as the converging light probe has a very high light transmittance and light damage threshold, can be directly imaged, and has a short optical path. It is very important when probing fluorescence spectroscopy or scattering spectroscopy as well as near-field light manipulation, near-field light storage, near-field light processing, dynamic observation and ultrafast phenomenon research. However, only relying on SIL to increase the refractive index of the object space, shorten the light wavelength of the object space, and thereb...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/18G02B21/00
Inventor 徐文东张锋干福熹王阳周飞魏劲松高秀敏
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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