Higher accuracy pressure based flow controller

A technology of flow limiter and flow control valve, which is applied in the direction of flow control, flow control using electric devices, non-electric variable control, etc., and can solve problems such as control errors

Inactive Publication Date: 2005-10-26
霍里巴斯特克公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

While these devices have proven useful in measuring and controlling flow, a number of disadvantages have also been recognized
For example, prior art mass flow controllers accurately control flow rates over a limited flow range, but introduce control errors when controlling fluid flow rates over a wider dynamic range

Method used

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  • Higher accuracy pressure based flow controller
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Examples

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Embodiment Construction

[0020] The present disclosure relates to flow controllers, and more particularly, to high precision pressure-based flow controllers. It should be understood, however, that the following disclosure provides many different implementations, or examples, for implementing different features of the flow controller. Specific examples of components and arrangements are described below in order to simplify the present disclosure. Of course, these are examples only and not intended to be limiting. Furthermore, the content of this disclosure may repeat reference numerals and / or letters in different instances. This repetition is for the sake of simplicity and clarity and, as such, is not intended to dictate a relationship between the various embodiments and / or structures described.

[0021] Refer to attached figure 1 , illustrates a typical mass flow controller (MFC). The flow controller is introduced and more fully described in U.S. Provisional Patent Application Serial No. 60 / 329031...

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Abstract

A mass flow controller is disclosed and includes body portion having a first internal passage and at least second internal passage formed therein, a flow control valve coupled to the body portion and in communication with the first and second internal passages, at least one pressure transducer coupled to the body portion and in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, a nonlinear flow restrictor configured to produce a high compressible laminar flow therethrough coupled to the second internal passage, a thermal sensor in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, and an exhaust vessel in communication with the flow restrictor.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to US Provisional Patent Application Serial No. 60 / 406511, filed August 28, 2002, which is hereby incorporated by reference in its entirety. Background technique [0003] Various manufacturing processes require the control of the flow rate and flow of fluids. For example, semiconductor manufacturing processes require the release of very precise quantities of fluids (mainly gases) into process chambers. During this manufacturing process, flow rates ranging from as high as twenty liters per minute to as low as a few tenths of cubic centimeters per minute (CCM) may be required. [0004] In line with this, mass flow controllers have been developed which measure and control the flow rate of a fluid, where the flow rate measurement is based on the thermal properties of the fluid. Typically, these thermal mass controllers are used to monitor the flow of fluids, such as toxic and highly reactiv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D7/06
CPCG05D7/0635G01F1/88G01F1/86Y10T137/7761G01F1/68
Inventor D·T·穆德W·W·怀特
Owner 霍里巴斯特克公司
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