Leak detecting device

A technology of leak detection and equipment, applied in the direction of detecting the appearance of fluid at the leak point, measuring devices, instruments, etc., can solve the problems of high internal pressure, the mass spectrometer cannot work, etc., and achieve the effect of good total conductance

Active Publication Date: 2006-07-05
INFICON INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The adjustable valve acts as an adjustable throttle, and the pressure at the input of the leak detection device is so high that the unrestricted connecting tubing in the mass spectrometer will vent to the internal pressure, which is so high that The mass spectrometer is not working

Method used

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  • Leak detecting device

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Embodiment Construction

[0014] In the drawing, a leak test device 10 is illustrated, which comprises a leak test device input 12 to which a test chamber 14 with a test sample 16 is connected. Sample 16 contains a test gas, for example helium, which can be detected by leak detection device 10 even in small amounts.

[0015] This leak detection device 10 is mainly formed of a pre-vacuum pump 20 , a high vacuum pump 22 and a mass spectrometer 24 connected in this order through gas lines. Further, a bypass line 26 is provided between the input end 12 of the leak detection device and the inlet 21 of the pre-vacuum pump 20 , and a connecting conduit 30 is provided between the input end 12 of the leak detection device and the intermediate inlet 28 of the high vacuum pump 22 . In the route of the connecting conduit 30 there are provided two valves, designated as a first valve 32 continuously adjustable with respect to its conductance and, parallel thereto, a second valve 34 configured as a switching valve. ...

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Abstract

The invention relates to a leak detecting device (10) working according to the countercurrent principle. Said device has a high vacuum pump (22), the inlet of which is connected to a mass spectrometer (24, in addition to a prevacuum pump (20) whose inlet (21) is connected to the outlet (23) of the high vacuum pump (22) and a leak detecting device input (12). The inventive leak detecting device further comprises a connecting line (30) between the leak detecting device input (12) and an intermediate inlet (28) of the high vacuum pump (22). A first valve (32) whose conductance can be regulated is arranged in the extension of the connecting line (30). Valves with a large inner diameter are expensive while valves with a small inner diameter show considerable resistance even when they are fully opened. According to the invention, a second valve arranged parallel to the first adjustable valve is provided in the extension of the connecting line. This makes it possible to use economical valves with relatively small inner diameter for the two valves (32,34)arranged in the connecting line (30), wherein the overall conductance of both opened valves (32,34) is considerably increased.

Description

technical field [0001] The invention relates to a leak detection device operating according to the counterflow type. Background technique [0002] A leak detection device is known from WO96 / 24828. In this type of leak detection equipment, the sensitivity and detection range of the leak detection equipment can be adjusted separately. For this purpose, a high vacuum pump whose inlet is connected to the mass spectrometer and whose outlet is connected to the pre-vacuum pump is provided with an intermediate inlet which is connected to the leak detection device via a connecting line. In the connecting conduit route, a conductance-adjustable valve is provided. The adjustable valve acts as an adjustable throttle, and the pressure at the input of the leak detection device is so high that the unrestricted connecting tubing in the mass spectrometer will vent to the internal pressure, which is so high that The mass spectrometer is not working. For reasons of expense, the inside diam...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/20
CPCG01M3/202
Inventor 托马斯·伯姆沃纳·格罗塞布莱
Owner INFICON INC
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