Quartz reflecting polarization beam splitting grating with 1550 nanometer wavelength
A reflective polarization, beam splitting grating technology, applied in the direction of diffraction grating
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0021] Using micro-optical technology to manufacture high-density rectangular polarization beam-splitting gratings, first deposit a layer of metal chromium film on a dry and clean fused silica substrate, and evenly coat a layer of positive photoresist on the chromium film (Shipley, S1818, USA ). The grating is then recorded holographically (see Figure 6), the He-Cd laser emits two beams of plane waves with a wavelength of 0.441 μm to form an interference field on the substrate at an angle of 2θ. The spatial period of the grating, that is, the distance between adjacent stripes, can be expressed as Λ=λ / (2*sinθ), where λ is the wavelength of the recording light. The larger the recording angle θ, the smaller Λ, so by changing the size of θ, the period of the grating can be controlled (the period value can be designed by the above extinction ratio and efficiency diagram), and high-density grating can be recorded. Next, after development, the photoresist pattern is transferred fr...
PUM
Property | Measurement | Unit |
---|---|---|
Etching depth | aaaaa | aaaaa |
Cycle | aaaaa | aaaaa |
Etching depth | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com